METHOD OF RECLAIMING AND STORING A VALUABLE PROCESS GAS |
|||||||
| 申请号 | PCT/US2009037862 | 申请日 | 2009-03-20 | 公开(公告)号 | WO2009117693A8 | 公开(公告)日 | 2009-11-19 |
| 申请人 | BROOKS AUTOMATION INC; BARTLETT ALLEN J; BALL-DIFAZIO DOREEN J; | 发明人 | BARTLETT ALLEN J; BALL-DIFAZIO DOREEN J; | ||||
| 摘要 | Cryogenic vacuum pump method for pumping a process chamber and reclaiming process gas. The valuable process gas may include a valuable gas, such as Xenon, Krypton or other rare gases, that is too expensive to be used in a once through loop of a semiconductor processing operation. The cryogenic vacuum pump has a refrigerator and a cryogenic panel in thermal contact with the refrigerator. The cryogenic vacuum pump also has a circuit. The circuit control heating to a first temperature in which a first process gas changes from a condensed phase while at least a second process gas remains in the condensed phase. The circuit also controls heating to a second temperature to reclaim the second process gas remaining in the condensed phase once the first process gas is removed. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
QQ群二维码
意见反馈
意见反馈