Cyclic accelerator for accelerating charge carriers and method for manufacturing a cyclic accelerator

申请号 US15000777 申请日 2016-01-19 公开(公告)号 US10136508B2 公开(公告)日 2018-11-20
申请人 Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.; 发明人 Karl Haberger;
摘要 What is shown is a cyclic accelerator for accelerating charge carriers. The cyclic accelerator includes a charge carrier source configured to generate free charge carriers, a vacuum chamber configured to receive the free charge carriers, wherein the vacuum chamber is produced by means of MEMS technology, and wherein at least a main surface region of the vacuum chamber has a semiconductor material. In addition, the cyclic accelerator has electrodes configured to accelerate the free charge carriers in the vacuum chamber by means of an alternating current field, and a magnetic field generator configured to generate a magnetic field perpendicularly to the direction of movement of the charge carriers.
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