Electron injector and free electron laser |
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| 申请号 | US15600149 | 申请日 | 2017-05-19 | 公开(公告)号 | US10103508B2 | 公开(公告)日 | 2018-10-16 |
| 申请人 | ASML Netherlands B.V.; | 发明人 | Andrey Alexandrovich Nikipelov; Vadim Yevgenyevich Banine; Pieter Willem Herman De Jager; Gosse Charles De Vries; Olav Waldemar Vladimir Frijns; Leonardus Adrianus Gerardus Grimminck; Andelko Katalenic; Johannes Antonius Gerardus Akkermans; Erik Loopstra; Wouter Joep Engelen; Petrus Rutgerus Bartraij; Teis Johan Coenen; Wilhelmus Patrick Elisabeth Maria Op 'T Root; | ||||
| 摘要 | A photocathode comprises a substrate in which a cavity is formed and a film of material disposed on the substrate. The film of material comprises an electron emitting surface configured to emit electrons when illuminated by a beam of radiation. The electron emitting surface is on an opposite side of the film of material from the cavity. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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