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Hall-voltage generator unit with amplifying action,and method of producing such unit

申请号 US61908466 申请日 1966-12-01 公开(公告)号 US3413712A 公开(公告)日 1968-12-03
申请人 SIEMENS AG; 发明人 ENGEL WALTER;
摘要
权利要求
1. THE METHOD OF PRODUCING A HALL-GENERATOR UNIT WHICH COMPRISES DEPOSITING SEMICONDUCTOR MATERIAL UPON AN INSULATING PLATE, ETCHING AWAY A PORTION OF THE DEPOSITED MATERIAL TO FORM A HALL PLATE AND TWO TUNNEL DIODE PORTIONS, DOPING THE TUNNEL DIODE PORTIONS TO FORM TUNNEL DIODES, DEPOSITING A CONDUCTING METAL TO FORM THE INTERNAL CIRCUIT CONNECTIONS TO SAID HALL PLATE AND TUNNEL DIODES.
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