SHELL TYPE ACTUATOR |
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| 申请号 | PCT/US2004027162 | 申请日 | 2004-08-20 | 公开(公告)号 | WO2005020434A3 | 公开(公告)日 | 2005-05-06 |
| 申请人 | CORNELL RES FOUNDATION INC; NAVAL RES LAB; ZALALUTDINOV MAXIM; REICHENBACH ROBERT B; AUBIN KEITH; HOUSTON BRIAN H; PARPIA JEEVAK M; CRAIGHEAD HAROLD G; | 发明人 | ZALALUTDINOV MAXIM; REICHENBACH ROBERT B; AUBIN KEITH; HOUSTON BRIAN H; PARPIA JEEVAK M; CRAIGHEAD HAROLD G; | ||||
| 摘要 | A micromechanical resonator (400, 1125) is formed on a substrate (120). The resonator has a partial spherical shell (110) clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectable out-of-plane motion. A laser (1110) is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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