Method of manufacturing MEMS switches with reduced switching volume |
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| 申请号 | US14883745 | 申请日 | 2015-10-15 | 公开(公告)号 | US09944517B2 | 公开(公告)日 | 2018-04-17 |
| 申请人 | INTERNATIONAL BUSINESS MACHINES CORPORATION; | 发明人 | Stephen E. Luce; Anthony K. Stamper; | ||||
| 摘要 | An approach includes a method of fabricating a switch. The approach includes forming a first fixed electrode and a second fixed electrode, forming a first cantilevered electrode aligned vertically over the first fixed electrode, forming a second cantilevered electrode aligned vertically over the second fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to at least one of the first fixed electrode and the second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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