METHOD OF MANUFACTURING A SWITCH |
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| 申请号 | US15627673 | 申请日 | 2017-06-20 | 公开(公告)号 | US20170294274A1 | 公开(公告)日 | 2017-10-12 |
| 申请人 | INTERNATIONAL BUSINESS MACHINES CORPORATION; | 发明人 | Stephen E. LUCE; Anthony K. STAMPER; | ||||
| 摘要 | MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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