Reconfigurable device for terahertz (THz) and infrared (IR) filtering and modulation |
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| 申请号 | US14910523 | 申请日 | 2014-08-06 | 公开(公告)号 | US09859079B2 | 公开(公告)日 | 2018-01-02 |
| 申请人 | The Regents of the University of Michigan; | 发明人 | Mona Jarrahi; Mehmet Unlu; Christopher W. Berry; Shenglin Li; | ||||
| 摘要 | A reconfigurable device for terahertz (THz) or infrared (IR) ranges that includes a base substrate, a lower array attached to the base substrate, and an upper array attached to the base substrate and at least partially suspended over the lower array. Activation of the reconfigurable device causes the upper array to mechanically flex towards the lower array so that electrical contact is made therebetween. Methods of fabricating and operating the reconfigurable device are also provided. | ||||||
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| 说明书全文 | |||||||
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