PIEZOELECTRIC THIN-FILM ELECTROMECHANICAL MICROSYSTEM DEVICE |
|||||||
| 申请号 | PCT/EP2005000430 | 申请日 | 2005-01-12 | 公开(公告)号 | WO2005078752A8 | 公开(公告)日 | 2005-10-20 |
| 申请人 | SUISSE ELECTRONIQUE MICROTECH; DUBOIS MARC-ALEXANDRE; | 发明人 | DUBOIS MARC-ALEXANDRE; | ||||
| 摘要 | A piezoelectric thin-film electromechanical microsystem (MEMS) device (18) comprising an RF-MEMS switch (14) and a bulk acoustic wave piezoelectric thin-film RF resonator (10) mounted on a substrate (12) provided with an acoustic mirror (28). The resonator comprises a thin film portion (16) between the two metal electrodes (20, 24). The switch (14) comprises a two-layer crossarm with an insulator layer (38) combined with a different portion (36) of the piezoelectric film (18) and having a movable metal contact (50) engageable with stationary metal contacts (46, 48) when the crossarm is bent by a voltage across the control electrodes (40, 42). | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
QQ群二维码
意见反馈
意见反馈