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Method and apparatus for forming oxide layer
申请号	JP18883783	申请日	1983-10-08	公开(公告)号	JPS6082655A	公开(公告)日	1985-05-10
申请人	Konishiroku Photo Ind Co Ltd;			发明人	OOTA TATSUO; KOMATSU KATSUAKI;
摘要	PURPOSE:To increase the adhesive strength of an oxide layer to a substrate by pretreating the substrate with an oxidizing gas, etc. in forming a transparent conductive oxide layer on the surface of a light transmissive substrate. CONSTITUTION:A substrate of a transparent polyethylene terephthalate film 1, etc. is pretreated with a gaseous mixture of gaseous O2 and an inert gas such as gaseous Ar ionized or activated with a high-frequency gaseous discharge device. The organic matter deposited on the surface of the substrate is oxidized and removed, and the surface is cleaned by said treatment. The transparent conductive layer 14 consisting of In2O3 or SnO2, a mixture of SnO2 and Sn, or SnO2 and CdO is formed on the surface of the substrate to manufacture a transparent conductive film 28. The part 14a contacting directly with the surface of the substrate 1 is adhered to the substrate 1 with high adhesive strength by the layer 14 consisting of the same oxide wherein the part 14a has a higher oxidation degree than the part 14b.
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