VOLTAGE-CONTROLLED SEMICONDUCTOR INDUCTOR AND METHOD |
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申请号 | US13100963 | 申请日 | 2011-05-04 | 公开(公告)号 | US20110204473A1 | 公开(公告)日 | 2011-08-25 |
申请人 | Krupakar M. Subramanian; | 发明人 | Krupakar M. Subramanian; | ||||
摘要 | A voltage-controlled semiconductor inductor and method is provided. According to various embodiments, the voltage-controlled inductor includes a conductor configured with a number of inductive coils. The inductor also includes a semiconductor material having a contact with at least a portion of at least one of the coils. The semiconductor material is doped to form a diode with a first doped region of first conductivity type, a second doped region of second conductivity type, and a depletion region. A voltage across the diode changes lengths of the first doped region, the second doped region and the depletion region, and adjacent coils in contact with at least one of the doped regions are electrically shorted, thereby varying the inductance of the inductor. In various embodiments, the inductor is electrically connected to a resistor and a capacitor to provide a tunable RLC circuit. Other aspects and embodiments are provided herein. | ||||||
权利要求 | What is claimed is: |
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说明书全文 | This application is a Divisional of U.S. Ser. No. 12/395,254, filed Feb. 27, 2009, which is a Divisional of U.S. Ser. No. 11/216,644, filed Aug. 31, 2005, now issued as U.S. Pat. No. 7,511,356, which applications are incorporated herein by reference in their entirety. This disclosure relates to electrical circuits, and more particularly, to variable inductors. Some electronic devices use tuning circuits in their operation. Examples include radio receivers and cellular telephones. Common tuning circuits include RLC (resistor-inductor-capacitor) circuits which use a variable capacitor to “tune” the circuit over a range of frequencies. In these variable-capacitor RLC circuits, the range of frequencies is limited by the range of capacitance over which a variable capacitor may be adjusted. The above-mentioned problems and others not expressly discussed herein are addressed by the present subject matter and will be understood by reading and studying this specification. Disclosed herein, among other things, is a voltage-controlled inductor. According to various embodiments, the inductor includes a conductor configured with a number of inductive coils. The inductor also includes a semiconductor material having a contact with at least a portion of at least one of the coils. The semiconductor material is doped to form a diode with a first doped region of first conductivity type, a second doped region of second conductivity type different from the first conductivity type, and a depletion region. A voltage across the diode changes lengths of the first doped region, the second doped region and the depletion region, and adjacent coils in contact with at least one of the doped regions are electrically shorted, thereby varying the inductance of the inductor. One aspect of this disclosure relates to an apparatus with a voltage-controlled inductor. According to an embodiment, the apparatus includes a resistor, a capacitor electrically connected to the resistor, and a voltage-controlled variable inductor electrically connected to the resistor and the capacitor, where inductance of the inductor is varied to change the resonant frequency of the apparatus. According to one embodiment, the capacitor includes a variable capacitance. According to various embodiments, the inductor includes a conductor configured with a number of inductive turns, and at least one diode electrically connected with at least a portion of at least one of the turns. A voltage across the at least one diode changes the dimensions of a depletion region, a first doped terminal region and a second doped terminal region, and adjacent turns in contact with at least one of the doped terminal regions are electrically shorted, thereby varying the inductance of the inductor. According to various embodiments, an apparatus includes a resistor, a capacitor electrically connected to the resistor, and a variable inductor electrically connected to the resistor and the capacitor. The variable inductor includes a conductor configured with a number of inductive coils, and a semiconductor material having an ohmic contact with at least a portion of at least one of the coils. The semiconductor material is doped to form a diode with a first doped region of first conductivity type, a second doped region of second conductivity type different from the first conductivity type, and a depletion region. A voltage across the diode changes lengths of the first doped region, the second doped region and the depletion region, and adjacent coils in contact with at least one of the doped regions are electrically shorted, thereby varying the inductance of the inductor. One aspect of this disclosure relates to a method of operating a variable inductor with a number of turns and a diode in contact with at least two of the number of turns. According to various embodiments, the method includes applying a first voltage across the diode to provide a length of a depletion region, a first diode terminal region, and a second diode terminal region of the diode to short a first number of turns to provide a first inductance for the variable inductor. The method also includes applying a second voltage across the diode to change the length of the depletion region, the first diode terminal region and the second diode terminal region of the diode to short a second number of turns to provide a second inductance for the variable inductor. One aspect of this disclosure relates to a method for making a variable inductor. According to various embodiments, the method includes forming a semiconductor material having an ohmic contact with at least a portion of a number of inductor coils. The method also includes doping the semiconductor material to form a diode such that a predetermined voltage applied across the diode electrically shorts a predetermined number of adjacent coils. According to an embodiment, doping the semiconductor material includes forming a plurality of diodes. This Summary is an overview of some of the teachings of the present application and is not intended to be an exclusive or exhaustive treatment of the present subject matter. Further details are found in the detailed description and appended claims. Other aspects will be apparent to persons skilled in the art upon reading and understanding the following detailed description and viewing the drawings that form a part thereof, each of which is not to be taken in a limiting sense. The scope of the present invention is defined by the appended claims and their legal equivalents. The following detailed description refers to the accompanying drawings which show, by way of illustration, specific aspects and embodiments in which the present invention may be practiced. The various embodiments are not necessarily mutually exclusive, as aspects of one embodiment can be combined with aspects of another embodiment. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments may be utilized and structural, logical, and electrical changes may be made without departing from the scope of the present invention. Some electronic devices use tuning circuits in their operation. Examples include radio receivers and cellular telephones. Common tuning circuits include RLC (resistor-inductor-capacitor) circuits which use a variable capacitor to “tune” the circuit over a range of frequencies. In these variable-capacitor RLC circuits, the range of frequencies is limited by the range of capacitance over which a variable capacitor may be adjusted. Disclosed herein is a variable inductor that can be used with a variable capacitor to increase the range of frequencies for an RLC tuning circuit. The variable inductor provided by the present subject matter is easily adjustable over a range of inductance and is capable of manufacture by common semiconductor fabrication techniques. The total number of turns that may be shorted is controlled by varying the reverse bias voltage. As a result of this interplay of connection and isolation of several turns within an inductor, the overall inductance of a device can be varied. This variation in inductance is in discrete steps, with the step size being the inductance generated by a single turn. According to an embodiment, applying the first voltage electrically shorts zero adjacent turns to provide a first inductance for the variable inductor. Applying the second voltage electrically shorts zero adjacent turns to provide a second inductance for the variable inductor, according to an embodiment. In one embodiment, applying the second voltage provides the second number of turns less than the first number of turns. Applying the second voltage provides the second number of turns equal to the first number of turns, in an embodiment. According to various embodiments, applying a reverse bias voltage across the diode increases a dimension of a depletion region of the diode and increases the number of inductor coils in contact with the depletion region, thereby varying the inductance of the inductor. Applying a voltage across the diode changes a dimension of a p-doped region of the diode and changes the number of inductor coils in contact with the p-doped region, thereby varying the inductance of the inductor in an embodiment. According to an embodiment, applying a voltage across the diode changes a dimension of an n-doped region of the diode and changes the number of inductor coils in contact with the n-doped region, thereby varying the inductance of the inductor. According to various embodiments, steps for making a variable inductor include laying down on a substrate the side of the coil labeled C as shown in According to an embodiment, the method for making a variable inductor includes forming a series of lower conductors of equal length on a substrate using ohmic contact forming material, each of the lower conductors parallel to one another and having a first end and a second end. The method also includes forming a series of first upright conductors and a series of second upright conductors in the substrate vertically from the series of lower conductors using ohmic contact forming material. The first upright conductors have a lower end and an upper end, the lower end connecting to first end of the lower conductors, and the second upright conductors having a lower end and an upper end, the lower end connecting to the second end of the lower conductors at right angles to the lower conductors. The method further includes etching a trench in the substrate. The trench has a depth greater than a thickness of the connecting conductor but less than a length of the upright conductors, and a width less than a length of the lower conductors. A first layer of semiconductor material is deposited to fill in the trench. According to an embodiment, the method also includes forming a series of connecting conductors along the top of the semiconductor material. Each of the connecting conductors is parallel to each other, with one end of each connecting conductor contacting the upper end of a first upright conductor, and further contacting the upper end of a second upright conductor whose lower end is connected to an adjacent lower conductor. The method also includes depositing a second layer of semiconductor material upon the first layer of semiconductor material to sandwich the series of connecting conductors, and doping the first and second layer of semiconductor material to form a diode perpendicular to the series of connecting conductors. According to various embodiments, the diode can be formed on the bottom of the coils. The diode can be formed on a side of the coils, in an embodiment. Other methods of making the variable inductor are within the scope of this disclosure. The present apparatus has a number of potential applications. The following examples, while not exhaustive, are illustrative of these applications. An RLC circuit is a kind of electrical circuit composed of a resistor (R), an inductor (L), and a capacitor (C). A voltage source (V) is also implied. It is called a second-order circuit or second-order filter as any voltage or current in the circuit is the solution to a second-order differential equation. The RLC circuit is an example of an electrical harmonic oscillator. The resonant or center frequency of such a circuit (in hertz) is: fc=1/2π√(LC) It is a form of bandpass or bandcut filter, and the Q factor is: Q=fc/BW=2πfc/R=1/π(R2C/L) There are two common configurations of RLC circuits: series (shown in In an electrical circuit, resonance occurs at a particular frequency when the inductive reactance and the capacitive reactance are of equal magnitude, causing electrical energy to oscillate between the magnetic field of the inductor and the electrical field of the capacitor. Resonance occurs because the collapsing magnetic field of the inductor generates an electric current in its windings that charges the capacitor, and the discharging capacitor provides an electric current that builds the magnetic field in the inductor, and the process is repeated. An analogy is a mechanical pendulum. At resonance, the series impedance of the two elements is at a minimum and the parallel impedance is at a maximum. Resonance is used for tuning and filtering, because resonance occurs at a particular frequency for given values of capacitance and inductance. An example of an RLC circuit is a radio tuner. The antenna of the radio picks up radio signals from every station in the area, but only the station whose frequency matches the natural (resonant) frequency of the tuning circuit will cause large currents to flow in the circuit. These currents, when amplified, are the ones that produce the sound heard by a listener. If the circuit is not properly tuned, then it may pick up two stations equally well. In various embodiments of the apparatus described in Further applications for variable inductors include use in matching circuits for radio frequency (RF) plasma processing tools. Matching circuits utilizing the disclosed variable inductor can provide more rapid matching compared to conventional stepper motor controlled matching circuits. Such quick response matching circuits are well suited for plasma-enhanced atomic layer deposition (PEALD) processes, where plasma is cycled on and off frequently. This disclosure includes several processes, diagrams, and structures. The present invention is not limited to a particular process order or logical arrangement. Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that any arrangement which is calculated to achieve the same purpose may be substituted for the specific embodiment shown. This application is intended to cover adaptations or variations, and includes any other applications in which the above structures and fabrication methods are used. It is to be understood that the above description is intended to be illustrative, and not restrictive. Combinations of the above embodiments, and other embodiments, will be apparent to those of skill in the art upon reviewing the above description. The scope of the present invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled. |