A method for coincident alignment of a laser beam and a charged particle beam |
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| 申请号 | EP13183272.7 | 申请日 | 2013-09-06 | 公开(公告)号 | EP2706556A3 | 公开(公告)日 | 2016-03-09 |
| 申请人 | FEI COMPANY; | 发明人 | Straw, Marcus; Emerson, Mark; | ||||
| 摘要 | A method and apparatus for aligning a laser beam (216) coincident with a charged particle beam (350). The invention described provides a method for aligning the laser beam through the center of an objective lens (214) and ultimately targeting the eucentric point of a multi-beam system (300). The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber (360) of the charged particle system. | ||||||
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| 说明书全文 | |||||||
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