MICROMACHINED ULTRASONIC TRANSDUCERS WITH A SLOTTED MEMBRANE STRUCTURE |
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| 申请号 | EP15846584 | 申请日 | 2015-10-01 | 公开(公告)号 | EP3201122A4 | 公开(公告)日 | 2018-05-30 |
| 申请人 | CHIRP MICROSYSTEMS INC; | 发明人 | GUEDES ANDRE; HORSLEY DAVID; KIANG MENG-HSIUNG; PRZYBYLA RICHARD; SHELTON STEFON; | ||||
| 摘要 | A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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