METHOD AND SYSTEM TO CONTROL MOVEMENT OF A BODY FOR NANO-SCALE MANUFACTURING |
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申请号 | PCT/US2005018862 | 申请日 | 2005-05-27 | 公开(公告)号 | WO2005119395A3 | 公开(公告)日 | 2007-03-08 |
申请人 | MOLECULAR IMPRINTS INC; | 发明人 | CHOI BYUNG-JIN; SREENIVASAN SIDLGATA V; | ||||
摘要 | The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extending parallel to the plane in which the body translates. This facilitates proper orientation of body with respect to a surface spaced-apart therefrom. | ||||||
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