METHOD AND SYSTEM TO CONTROL MOVEMENT OF A BODY FOR NANO-SCALE MANUFACTURING

申请号 PCT/US2005018862 申请日 2005-05-27 公开(公告)号 WO2005119395A3 公开(公告)日 2007-03-08
申请人 MOLECULAR IMPRINTS INC; 发明人 CHOI BYUNG-JIN; SREENIVASAN SIDLGATA V;
摘要 The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extending parallel to the plane in which the body translates. This facilitates proper orientation of body with respect to a surface spaced-apart therefrom.
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