SYSTEM FOR MEASURING THE POSITION AND MOVEMENT OF AN OBJECT |
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| 申请号 | US15800664 | 申请日 | 2017-11-01 | 公开(公告)号 | US20180135969A1 | 公开(公告)日 | 2018-05-17 |
| 申请人 | NIKON METROLOGY N.V.; | 发明人 | Geert VANDENHOUDT; Patrick BLANCKAERT; Hans THIELEMANS; | ||||
| 摘要 | The disclosure relates to a system for measuring the position of an object in a measurement volume, including: an optical angular measurement device, disposed with static optics, configured for measurement of the an azimuth and elevation angle of the object in the measurement volume with respect to the optical angular measurement device, a range measurement device, disposed with static component, configured for measurement of the range of the object in the measurement volume. It further relates to a use of the system and a measurement method. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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