序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
1 干渉撮像におけるサブアパーチャベースの収差測定及び補正用のシステム及び方法 JP2015555722 2014-01-31 JP2016504947A 2016-02-18 クマール、アビシェーク; アール. タムリンソン、アレクサンダー; ライトゲープ、ライナー
ほぼ回折限界解像度を達成するために、干渉撮像用の後処理技術として、厚いサンプルにおけるサブアパーチャ相関に基づいた波面測定及び補正用の方法及びシステムが説明される。理論、シミュレーション、及び実験結果が、全視野干渉顕微鏡検査法の場合のために提示される。本発明の技術は、任意のコヒーレント干渉撮像技術に適用することができ、且つ如何なるシステムパラメータの知識も必要としない。本出願の一実施形態において、焦点ぼけ収差を補正する高速で単純な方法が説明される。その方法のための様々な用途が提示される。
2 小型自蔵式ホログラフィ及び干渉計デバイス JP2015502150 2013-01-31 JP2015520358A 2015-07-16 ヴラディミルスキー,ユリ; リジコフ,レヴ
【課題】物体及び参照ビーム経路内に存在する変位及び振動エラーを解消する方法を含む小型自蔵式ホログラフィ及び干渉計デバイス並びに方法が開示される。【解決手段】自蔵式装置(600)は光を散乱させる被照明物体(302)と、物体ビーム(350)を形成する対物レンズ(304)とを含む。自蔵式装置はまた、対物レンズ(304)の瞳面(306)を通過する物体ビームの一部から参照ビーム(352)を形成する参照ビーム形成レンズ群(308)を含む。物体ビーム及び参照ビームは共用光路に沿って伝搬し、その結果、相対的変位及び振動エラーが解消される。自蔵式装置は、物体ビーム及び参照ビームが再結合して検出及び分析対象の干渉パターンを形成する画像面(316)を含む。自蔵式装置を用いて不安定性を解消する方法も開示される。【選択図】図6
3 SYSTEM AND METHOD FOR HOLOGRAPHIC IMAGING OF A SINGLE PLANE OF AN OBJECT EP15821651.5 2015-07-10 EP3169970A1 2017-05-24 SIEGEL, Nisan; BROOKER, Gary
A system and method to produce a hologram of a single plane of a three dimensional object includes an electromagnetic radiation assembly to elicit electromagnetic radiation from a single plane of said object, and an assembly to direct the elicited electromagnetic radiation toward a hologram-forming assembly. The hologram-forming assembly creates a hologram that is recorded by an image capture assembly and then further processed to create maximum resolution images free of an inherent holographic artifact.
4 SYSTEMS AND METHODS FOR SUB-APERTURE BASED ABERRATION MEASUREMENT AND CORRECTION IN INTERFEROMETRIC IMAGING US15683572 2017-08-22 US20180035883A1 2018-02-08 Abhishek KUMAR; Alexandre R. TUMLINSON; Rainer LEITGEB
Systems and methods for sub-aperture correlation based wavefront measurement in a thick sample and correction as a post processing technique for interferometric imaging to achieve near diffraction limited resolution are described. Theory, simulation and experimental results are presented for the case of full field interference microscopy. The inventive technique can be applied to any coherent interferometric imaging technique and does not require knowledge of any system parameters. In one embodiment of the present application, a fast and simple way to correct for defocus aberration is described. A variety of applications for the method are presented.
5 Systems and methodologies related to 3-D imaging and viewing US13767775 2013-02-14 US09581966B1 2017-02-28 James A. Georges, III
Systems and methods for three-dimensional imaging and viewing are disclosed. A method for generating a three-dimensional image may include producing a pattern in a spatial light modulator based on data representative of an image of an object, illuminating the spatial light modulator so as to yield a projection beam, masking at least one portion of the projection beam such that a portion of the projection beam is selected, and propagating the selected portion to an exit pupil so as to form a virtual 3-D image of the object when viewed at the exit pupil. An apparatus may include a projector comprising a spatial light modulator array that modulates the phase of light to produce a phase modulated beam that is projected to a viewer thereby forming a 3-D image of the object when viewed by the viewer, and processing electronics configured to extract phase information from a signal.
6 Systems and Methods of Dual-Plane Digital Holographic Microscopy US13234485 2011-09-16 US20130070251A1 2013-03-21 Bhargab Das; Chandra S. Yelleswarapu; D.V.G.L.N Rao
An embodiment of the disclosed DHM system includes a light source configured to emit coherent optical waves, a first optical Fourier element configured to Fourier transform the optical waves from the object area, wherein the Fourier transform occurs at a Fourier plane and the optical waves from the object area includes directly transmitted waves and diffracted waves, a phase modulator at the Fourier plane configured to introduce a phase delay between the directly transmitted waves and the diffracted waves, a second optical Fourier element configured to receive the directly transmitted waves and the diffracted waves from the phase modulator and to inversely Fourier transform the directly transmitted waves and the diffracted waves to provide interfered optical waves, and at least one imaging device configured to record the interfered optical waves at two image planes to generate a first interferogram and a second interferogram.
7 OPTICAL SYSTEM FOR A HOLOGRAPHIC MICROSCOPE US13538185 2012-06-29 US20130003073A1 2013-01-03 Chung-Chieh Yu; Isao Matsubara; Yasuyuki Unno
An optical system for a holographic microscope includes: a light source configured to emit a light beam; a grating configured to split the light beam into a reference beam and an object beam; a lens unit configured to irradiate a sample by the reference and object beams split by the grating; a spatial filter including a first region for the reference beam and a second region for the object beam; and a detector configured to detect an interference pattern caused by the reference and object beams.
8 サンプルに対する干渉撮像データにおける波面を特徴付けるための方法及び干渉撮像装置 JP2015555722 2014-01-31 JP6412017B2 2018-10-24 クマール、アビシェーク; タムリンソン、アレクサンダー アール.; ライトゲープ、ライナー
9 物体の単一面のホログラフィック撮像のシステム及び方法 JP2017502870 2015-07-10 JP2017520801A 2017-07-27 ブルッカー・ゲーリー; シーゲル・ニッサン
3次元物体の単一面のホログラムを生成するシステム及び方法は、前記物体の単一面から電磁放射を引き出す電磁放射アセンブリと、引き出された電磁放射をホログラム形成アセンブリに導くアセンブリとを含む。ホログラム形成アセンブリは、画像取り込みアセンブリによって記録されたホログラムを生成し、さらに処理して、固有のホログラフィックアーチファクトのない最高解像度画像を生成する。
10 Method and Apparatus for Defect Inspection of Transparent Substrate US15590706 2017-05-09 US20180188016A1 2018-07-05 Chau-Jern Cheng; Chin-Yu Liu; Xin-Ji Lai
A method for defect inspection of a transparent substrate comprises (a) providing an optical system for performing a diffraction process of object wave passing through a transparent substrate, (b) interfering and wavefront recording for the diffracted object wave and a reference wave to reconstruct the defect complex images (including amplitude and phase) of the transparent substrate, (c) characteristics analyzing, features classifying and sieving for the defect complex images of the transparent substrate, and (d) creating defect complex images database based-on the defect complex images for comparison and detection of the defect complex images of the transparent substrate.
11 Systems and methods for sub-aperture based aberration measurement and correction in interferometric imaging US14758792 2014-01-31 US09775511B2 2017-10-03 Abhishek Kumar; Alexandre R. Tumlinson; Rainer Leitgeb
Systems and methods for sub-aperture correlation based wavefront measurement in a thick sample and correction as a post processing technique for interferometric imaging to achieve near diffraction limited resolution are described. Theory, simulation and experimental results are presented for the case of full field interference microscopy. The inventive technique can be applied to any coherent interferometric imaging technique and does not require knowledge of any system parameters. In one embodiment of the present application, a fast and simple way to correct for defocus aberration is described. A variety of applications for the method are presented.
12 Systems and methods for sub-aperture based aberration measurement and correction in interferometric imaging US14164955 2014-01-27 US09247874B2 2016-02-02 Abhishek Kumar; Alexandre R. Tumlinson; Rainer Leitgeb
Systems and methods for sub-aperture correlation based wavefront measurement in a thick sample and correction as a post processing technique for interferometric imaging to achieve near diffraction limited resolution are described. Theory, simulation and experimental results are presented for the case of full field interference microscopy. The inventive technique can be applied to any coherent interferometric imaging technique and does not require knowledge of any system parameters. In one embodiment of the present invention, a fast and simple way to correct for defocus aberration is described. A variety of applications for the inventive method are presented.
13 Compact Self-Contained Holographic and Interferometric Apparatus US14388322 2013-01-31 US20150085291A1 2015-03-26 Yuli Vladimirsky; Lev Ryzhikov
A compact, self-contained holographic and interferometric apparatus and methods for eliminating vibration, including methods for eliminating relative displacement and vibration errors present in object and reference beam paths, are disclosed. The self-contained apparatus (600) includes an illuminated object (302) that scatters light and an objective lens (304) to form an object beam (350). The self-contained apparatus also includes a reference beam forming lens group (308) that forms a reference beam (352) from a portion of the object beam that passes through a pupil plane (306) of the objective lens (304). The object beam and the reference beam are propagated along a shared optical path, which eliminates relative displacement and vibration errors. The self-contained apparatus includes an image plane (316) where the object beam and reference beam are recombined to create an interference pattern, which is detected and analyzed. Methods for eliminating the instability, using the self-contained apparatus, are disclosed.
14 MASTERHOLOGRAMM UND VERFAHREN SOWIE VORRICHTUNG ZUM HERSTELLEN EINES MASTERHOLOGRAMMS FÜR EIN KONTAKTKOPIERVERFAHREN EP16784159.2 2016-10-14 EP3362857A1 2018-08-22 KUNATH, Christian; KLÜNDER, Kathrin; SPRENGER, Martin; GAHLBECK, Jeffry; MÄRTENS, Detlef
The invention relates to a method for producing a master hologram (45) for a contact printing method, such a master hologram (45) and a method for producing individualized holograms (345) and individualized holograms (345) which are produced using such a master hologram (45) by way of the contact printing method. The method for producing a master hologram (45) comprises the following steps: arranging a diffuse scattering device (10), a stop (20), a Fourier lens (30) and a holographic recording material (40) on an optical arrangement axis (3) such that an optical axis (31) of the Fourier lens (30), a surface normal (41) of the holographic recording material (40) and a surface normal (26) of a stop aperture plane (25) of the stop (20) are collinear with the optical arrangement axis (3), wherein the stop (20) is arranged immediately adjoining the diffuse scattering device (10) between the diffuse scattering device (10) and the Fourier lens (30) and the diffuse scattering device (10) is arranged in the focal plane (32) of the Fourier lens (30) and coherent first light (110) is radiated onto the diffuse scattering device (10) in order thereby to generate the diffusely scattered light (115) which is delimited by means of the stop (10) and guided as object light (119) into the holographic recording material (40) by means of the Fourier lens (30) and second coherent light (120), coherent with the first coherent light (110), is radiated into the holographic recording material (40) as reference light (129) from a side facing away from the Fourier lens (30) in order to form a reflection volume hologram (45) in the holographic recording material (40).
15 SYSTEM AND METHOD FOR HOLOGRAPHIC IMAGING OF A SINGLE PLANE OF AN OBJECT EP15821651 2015-07-10 EP3169970A4 2018-06-13 SIEGEL NISAN; BROOKER GARY
A system and method to produce a hologram of a single plane of a three dimensional object includes an electromagnetic radiation assembly to elicit electromagnetic radiation from a single plane of said object, and an assembly to direct the elicited electromagnetic radiation toward a hologram-forming assembly. The hologram-forming assembly creates a hologram that is recorded by an image capture assembly and then further processed to create maximum resolution images free of an inherent holographic artifact.
16 SYSTEMS AND METHODS FOR SUB-APERTURE BASED ABERRATION MEASUREMENT AND CORRECTION IN INTERFEROMETRIC IMAGING EP14702258.6 2014-01-31 EP2951648A1 2015-12-09 KUMAR, Abhishek; TUMLINSON, Alexandre R; LEITGEB, Rainer
Systems and methods for sub-aperture correlation based wavefront measurement in a thick sample and correction as a post processing technique for interferometric imaging to achieve near diffraction limited resolution are described. Theory, simulation and experimental results are presented for the case of full field interference microscopy. The inventive technique can be applied to any coherent interferometric imaging technique and does not require knowledge of any system parameters. In one embodiment of the present invention, a fast and simple way to correct for defocus aberration is described. A variety of applications for the inventive method are presented.
17 Dispositif d'holographie numérique EP00400899.1 2000-03-31 EP1043632A1 2000-10-11 Collot, Laurent, THOMSON-CSF Prop. Intell.; Le Clerc, Frédérique, THOMSON-CSF Prop. Intell.; Gross, Michel, THOMSON-CSF Prop. Intell.

L'invention concerne un dispositif d'holographie numérique, et s'applique par exemple à la cartographie tridimensionnelle des objets.

Le dispositif selon l'invention permet de déterminer l'amplitude complexe d'une onde signal (WS2) issue d'un objet (DUT) éclairé par une onde d'illumination (WS1) connue. Pour cela, II comprend

  • des moyens (LAS, AOM1, AOM2) de génération de deux ondes cohérentes entre elles, l'onde (WS1) d'illumination de l'objet, et une onde de référence (WREF) connue, les deux ondes présentant une différence de phase connue φi(t) fonction du temps,
  • des moyens (BS) pour faire interférer, sur des moyens de détection (DET), l'onde (WREF) de référence et l'onde signal (WS2) issue de l'objet, les moyens de détection permettant un échantillonnage de la figure d'interférence résultant en l'acquisition d'un nombre N donné d'interférogrammes, N supérieur ou égal à 2, correspondant chacun à une différence de phase distincte entre l'onde signal et l'onde de référence incidentes sur les moyens de détection, l'amplitude complexe de l'onde signal étant alors déterminée à partir du traitement desdits inteférogrammes.

18 SYSTEM AND METHOD FOR HOLOGRAPHIC IMAGING OF A SINGLE PLANE OF AN OBJECT US15326336 2015-07-10 US20170205766A1 2017-07-20 Gary BROOKER; Nisan SIEGEL
A system and method to produce a hologram of a single plane of a three dimensional object includes an electromagnetic radiation assembly to elicit electromagnetic radiation from a single plane of said object, and an assembly to direct the elicited electromagnetic radiation toward a hologram-forming assembly. The hologram-forming assembly creates a hologram that is recorded by an image capture assembly and then further processed to create maximum resolution images free of an inherent holographic artifact.
19 Systems and Methods for Performing Self-Interference Incoherent Digital Holography US15100385 2015-07-08 US20170108829A1 2017-04-20 Myung K. Kim
In one embodiment, a self-interference incoherent digital holography system including a light sensor and a diffractive filter configured to receive light from an object to be holographically imaged and generate holographic interference patterns on the light sensor. A self-interference incoherent digital holography system comprising: a light sensor; and a diffractive filter configured to receive light from an object to be holographically imaged and generate holographic interference patterns on the sensor.
20 Optical system for a holographic microscope including a spatial filter US13538185 2012-06-29 US09360423B2 2016-06-07 Chung-Chieh Yu; Isao Matsubara; Yasuyuki Unno
An optical system for a holographic microscope includes: a light source configured to emit a light beam; a grating configured to split the light beam into a reference beam and an object beam; a lens unit configured to irradiate a sample by the reference and object beams split by the grating; a spatial filter including a first region for the reference beam and a second region for the object beam; and a detector configured to detect an interference pattern caused by the reference and object beams.
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