序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
1 在轴外全息照相中对物体波的准确重构的装置 CN201210311755.4 2012-08-29 CN102981390B 2017-05-10 K-N.赵
发明涉及一种用于制备表示物体的图像的数字全息图的方法和装置,包括步骤:产生第一参考光束;将反射的测量光束引导到光学传感器;将第一参考光束引导到第一镜,并将反射的光束引导到该光学传感器,使得两光束产生干涉;提供干涉图案的数字信号;处理该信号获得数字全息图;使该数字全息图经历空间频率域中的傅立叶变换获和第一共轭图像能级的光谱;滤波获得表示物体的能级;产生第二参考光束;将第二参考光束引导到第一镜,并将反射的光束引导到光学传感器;产生第二图像能级和第二图像能级的共轭;以及替换与DC能级重叠的第一图像能级的部分。
2 在轴外全息照相中对物体波的准确重构的装置 CN201210311755.4 2012-08-29 CN102981390A 2013-03-20 K-N.赵
发明涉及一种用于制备表示物体的图像的数字全息图的方法和装置,包括步骤:产生第一参考光束;将反射的测量光束引导到光学传感器;将第一参考光束引导到第一镜,并将反射的光束引导到该光学传感器,使得两光束产生干涉;提供干涉图案的数字信号;处理该信号获得数字全息图;使该数字全息图经历空间频率域中的傅立叶变换获和第一共轭图像能级的光谱;滤波获得表示物体的能级;产生第二参考光束;将第二参考光束引导到第一镜,并将反射的光束引导到光学传感器;产生第二图像能级和第二图像能级的共轭;以及替换与DC能级重叠的第一图像能级的部分。
3 具有相位调制器的用于车前灯的照明设备 CN201380015226.2 2013-02-06 CN104204658A 2014-12-10 J·克里斯马斯; D·马西亚诺; M·柯林
提供了一种被配置成生成用于照亮场景的可控光束的照明设备。该设备包括被配置成向入射光的光束提供可选择的相位延迟分布的可寻址空间调光器。该设备还包括被配置成接收来自空间调光器的经相位调制的光并且形成光分布的傅立叶光学器件。该设备还进一步包括被配置成投射光分布以形成作为所述可控光束的照明图案的投影光学器件。
4 具有空间滤光片的全息掩模检查系统 CN201080050478.5 2010-11-12 CN102597890A 2012-07-18 R·萨拉尔德森; A·邓鲍夫; E·凯蒂; Y·沙玛莱; R·雅克布
公开了用于全息掩模检查的设备、方法和光刻系统。全息掩模检查系统(300,600,700)包括照射源(330)、空间滤光片(350)和图像传感器(380)。照射源配置成将辐射束(331)照射到掩模(310)的目标部分上。空间滤光片(350)布置在光学系统(390,610,710)的傅里叶变换光瞳平面中,其中空间滤光片接收来自所述掩模的目标部分的被反射的辐射束(311)的至少一部分。光学系统布置成组合(360,660,740)被反射的辐射束(311)的所述部分与参考辐射束(361,331)以产生组合的辐射束。此外,图像传感器(380)配置成捕获组合的辐射束的全息图像。图像可以包含一个或更多的掩模缺陷
5 用于远程地检测目标的传感器和成像系统 CN200911000286.9 2009-12-18 CN101813776A 2010-08-25 弗雷德里克·塔亚德; 艾蒂安·贝兰
发明公开一种用于远程地检测目标的传感器,该传感器包括:光源,其相干长度比传感器和目标之间的距离短;分束器,把发射的光束分成入射光束和基准光束;光折射晶体,在基准光束和由入射光束照射的目标反射的反射光束的干涉接收时,记录全息图,并在基准光束作用下在由晶体通过各向异性衍射再发射的衍射光束中播放全息图;检测器,在接收衍射光束时记录信息;偏振滤光片,消除由晶体在接收反射光束时透射的反射光束的主要部分,以使检测器只从晶体接收衍射光束。传感器和集成传感器的成像系统能够透过漫射介质测量。
6 Sensor and image system for remote object detection JP2009288285 2009-12-18 JP2010156690A 2010-07-15 TAILLADE FREDERIC; BELIN ETIENNE
PROBLEM TO BE SOLVED: To provide a simple sensor which performs remote measurement of the position and/or shape of an object when it is placed in a diffusive medium. SOLUTION: The sensor includes: a light source 110 having shorter coherence length with respect to the distance between the sensor and the object; a beam splitter 112 for splitting a sent beam into an incident beam 126 and a standard beam 123; a photorefractive crystal glass 114 for generating a hologram when receiving the interference between the standard beam 123 and a beam 127 reflected by the object 120 irradiated with the incident beam 126 and reproducing the hologram through a diffraction beam 124 sent back from the crystal glass through anisotropic diffraction by the action of the standard beam 123; and a detector 116 for generating information when receiving the diffraction beam 124. The detector 116 receives only the diffraction beam 124 from the crystal glass. COPYRIGHT: (C)2010,JPO&INPIT
7 Method and device for obtaining a sample by three-dimensional microscopy JP2003508909 2002-07-01 JP2004538451A 2004-12-24 デュボア,フランク; ユラソウスキー,カトリーヌ
本発明は、三次元顕微鏡検査法により、試料、特に厚い生物学的試料およびこの試料が放射する蛍光のフィールドを入手するための方法に関する。 本発明は、一方ではデジタル・ホログラフィにより入手した干渉計信号、他方では、前記試料からの蛍光信号を順次別々に測定し、記録する測定および記録ステップと、デジタル・ホログラフィにより入手した前記干渉計信号、およびこのように記録した前記蛍光信号を、所与の時間の試料自体のおよび前記試料が放射した蛍光フィールドの鮮明な三次元画像を再構成するために結合する処理ステップとを含むことを特徴とする。
8 JPH07505964A - JP51355093 1993-02-15 JPH07505964A 1995-06-29
9 Holographic mask inspection system having a spatial filter JP2012550335 2010-11-12 JP2013518261A 2013-05-20 セラルドセン,ロバート; ボエフ,アリー デン; カテイ,エリック; シャマレフ,イェヴゲニー; ジェーコブス,リチャード
Disclosed are apparatuses, methods, and lithographic systems for holographic mask inspection. A holographic mask inspection system (300, 600, 700) includes an illumination source (330), a spatial filter (350), and an image sensor (380). The illumination source being configured to illuminate a radiation beam (331) onto a target portion of a mask (310). The spatial filter (350) being arranged in a Fourier transform pupil plane of an optical system (390, 610, 710), where the spatial filter receives at least a portion of a reflected radiation beam (311) from the target portion of the mask. The optical system being arranged to combine (360, 660, 740) the portion of the reflected radiation beam (311) with a reference radiation beam (361, 331) to generate a combined radiation beam. Further, the image sensor (380) being configured to capture holographic image of the combined radiation beam. The image may contain one or more mask defects.
10 Apparatus for exact reconstruction of object wave in off-axis digital holography JP2012016770 2012-01-30 JP2013054336A 2013-03-21 JU KI-NAM
PROBLEM TO BE SOLVED: To prepare a digital hologram representing an image of an object.SOLUTION: A method for preparing a digital hologram representing an image of an object comprises the steps of: irradiating an object by a measurement beam and guiding the reflected measurement beam to an optical sensor; guiding a first reference beam to a first mirror disposed at an angle other than 90° to an optical axis of the first reference beam and guiding the reflected beam to the optical sensor; obtaining a digital signal representing interference fringes generated on the optical sensor; processing the digital signal to obtain a digital hologram; subjecting the digital hologram to Fourier transform to obtain a spectrum comprising a DC-term, a first image term, and a first conjugate image term; filtering the spectrum; guiding a second reference beam to the first mirror and guiding the reflected beam to the optical sensor; leading to a second image term and a conjugate of the second image term in the spectrum in the spatial frequency domain; and replacing a section of the first image term overlapping with the DC-term, by a corresponding section of the second image term.
11 Method of manufacturing hologram by picosecond laser JP2002036010 2002-02-13 JP2003241626A 2003-08-29 HOSONO HIDEO; HIRANO MASAHIRO; KAWAMURA KENICHI; MIURA TAISUKE; KAMIOKA HAYATO
PROBLEM TO BE SOLVED: To provide a method of forming micropolograms in a transparent compound, semiconductor, organic matter or metal by interfered laser pulses having a high energy density and these hologram. SOLUTION: The method of manufacturing the holograms by a two-beam interference exposure method comprising using a solid-state laser emitting a laser beam of 900 femtosecond < τ≤100 picosecond in pulse width τ and ≥10 μJ/pulse in laser power having coherence as a light source and irreversibly recording the surface relief type hologram on the surface of a base material or the buried hologram within the base material by bisecting the pulse light from the laser, temporally and spatially controlling the two beams, condensing these beams onto or into the base material for recording the hologram, and temporally and spatially aligning the convergent spots of the two beams. COPYRIGHT: (C)2003,JPO
12 Holographic device JP18249988 1988-07-20 JPH0232386A 1990-02-02 HIGUCHI KAZUTO
PURPOSE: To generate a hologram as an object to be photographed even in the case of an object for moving extending over a comparatively wide range by detecting a position of a moving object to be photographed and adjusting the optical path length on the way of an optical path of an object light and/or an optical path of a reference light, based on its position information. CONSTITUTION: Position information of a moving object to be photographed 60 which is detected by a position detecting device 100 is sent to a controller 102 through a signal transmission line 101, and based on position information, and a position coordinate of every important point of an optical system which is initialized in advance, optical path length of an object light and optical path length of a reference light are derived, whether a difference of both of them is held in an allowable value or not is decided, and also, from an hourly difference between the latest input position information and its previous position information, a moving speed of the object to be photographed is derived, a moving amount of the object to be photographed is predicted, and at the time point when it has become necessary to adjust the optical path length by analyzing synthetically those information, a driving instruction is issued to an optical path length adjusting device 104 through a signal transmission line 103. In such a way, even in the case the object to be photographed moves dynamically in a wide range, hologram can be formed. COPYRIGHT: (C)1990,JPO&Japio
13 공간 필터를 갖는 홀로그래픽 마스크 검사 시스템 KR1020127022262 2010-11-12 KR1020120127618A 2012-11-22 타랄드센,로버트; 덴보에프,아리에; 케이티,에릭; 슈마레프,예프게니; 제이콥스,리차드
홀로그래픽 마스크 검사를 위한 장치들, 방법들 및 리소그래피 시스템들이 개시된다. 홀로그래픽 마스크 검사 시스템(300, 600, 700)은 조명 소스(330), 공간 필터(350) 및 이미지 센서(380)를 포함한다. 조명 소스는 마스크(310)의 타겟부 상으로 방사선 빔(331)을 조명하도록 구성된다. 공간 필터(350)는 광학 시스템(390, 610, 710)의 푸리에 변환 퓨필 평면에 배치되며, 공간 필터는 마스크의 타겟부로부터 반사된 방사선 빔(311)의 적어도 일부분을 수용한다. 광학 시스템은 기준 방사선 빔(361, 331)과 반사된 방사선 빔(311)의 일부분을 조합(360, 660, 740)하여, 조합된 방사선 빔을 생성하도록 배치된다. 또한, 이미지 센서(380)는 조합된 방사선 빔의 홀로그래픽 이미지를 캡처하도록 구성된다. 상기 이미지는 1 이상의 마스크 결함들을 포함할 수 있다.
14 Lighting device for headlights with a phase modulator US15372312 2016-12-07 US10061267B2 2018-08-28 Jamieson Christmas
There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.
15 Holographic lidar system US15364173 2016-11-29 US10061266B2 2018-08-28 Jamieson Christmas
There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.
16 LIGHTING DEVICE FOR HEADLIGHTS WITH A PHASE MODULATOR US15372337 2016-12-07 US20170080848A1 2017-03-23 Jamieson Christmas; Mikael Collin
There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.
17 LIGHTING DEVICE FOR HEADLIGHTS WITH A PHASE MODULATOR US15364173 2016-11-29 US20170074985A1 2017-03-16 Jamieson Christmas
There is provided a lighting device arranged to produce a controllable light beam for illuminating a scene. The device comprises an addressable spatial light modulator arranged to provide a selectable phase delay distribution to a beam of incident light. The device further comprises fourier optics arranged to receive phase-modulated light from the spatial light modulator and form a light distribution. The device further comprises projection optics arranged to project the light distribution to form a pattern of illumination as said controllable light beam.
18 Pulsed-laser systems and methods for producing holographic stereograms with pre-sensitization of holographic recording materials US12404053 2009-03-13 US08665505B2 2014-03-04 Craig Newswanger; Pankaj Lad; Robert L. Sitton; Qiang Huang; Michael A. Klug; Mark E. Holzbach
Pre-sensitization techniques can be used in conjunction with holographic recording materials to allow high quality holographic stereograms to be recorded in those holographic recording materials using pulsed lasers. Various hologram production system hardware and software designs for use with pulsed lasers can be used with the pre-sensitization techniques.
19 Apparatus for the exact reconstruction of the object wave in off-axis digital holography US13341178 2011-12-30 US08659810B2 2014-02-25 Ki-Nam Joo
A method and apparatus for preparing a digital hologram representing an image of an object includes generating a measurement beam and a first reference beam, irradiating the object by the measurement beam, and guiding the measurement beam reflected to an optical sensor. The method also includes guiding the first reference beam to a first mirror, and guiding the reflected beam to the optical sensor so that both beams generate an interference pattern on the sensor. The method includes providing a digital signal representing the interference pattern on the optical sensor, to obtain a digital hologram, and subjecting the digital hologram to a Fourier transform in the spatial frequency domain to obtain a spectrum. The method further includes replacing a section of a first image term overlapped by a DC-term by a corresponding section of a second image term.
20 Holographic Mask Inspection System with Spatial Filter US13497178 2010-11-12 US20120281197A1 2012-11-08 Robert Albert Tharaldsen; Arie Jeffrey Den Boef; Eric Brian Catey; Yevgeniy Konstantinovich Shmarev; Richard David Jacobs
Disclosed are apparatuses, methods, and lithographic systems for holographic mask inspection. A holographic mask inspection system (300, 600, 700) includes an illumination source (330), a spatial filter (350), and an image sensor (380). The illumination source being configured to illuminate a radiation beam (331) onto a target portion of a mask (310). The spatial filter (350) being arranged in a Fourier transform pupil plane of an optical system (390, 610, 710), where the spatial filter receives at least a portion of a reflected radiation beam (311) from the target portion of the mask. The optical system being arranged to combine (360, 660, 740) the portion of the reflected radiation beam (311) with a reference radiation beam (361, 331) to generate a combined radiation beam. Further, the image sensor (380) being configured to capture holographic image of the combined radiation beam. The image may contain one or more mask defects.
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