| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 煤样瓦斯吸附解吸的伺服测量试验系统与方法 | CN201610050406.X | 2016-01-26 | CN105547907A | 2016-05-04 | 王登科; 魏建平; 温志辉; 李波; 姚邦华; 孙刘涛 |
| 煤样瓦斯吸附解吸的伺服测量试验系统与方法，包括瓦斯供给装置、抽真空装置、瓦斯吸附装置、瓦斯解吸测量装置和电控装置；瓦斯供给装置包括高压瓦斯罐和充气罐；抽真空装置包括真空泵和真空计；瓦斯吸附装置包括煤样罐；瓦斯解吸测量装置包括储水容器、集水容器、电子天平、伺服电机、固定支架和导水管。本发明通过将瓦斯解吸气体的体积测量转化为液态水体积的测量，试验操作简便，试验数据精确，实现了试验数据实时精确自动采集和实时显示，并且确保煤样解吸出的瓦斯气体在一个大气压条件下，为研究煤体瓦斯吸附解吸规律，提供更加可靠的数据基础。 | ||||||
| 2 | Automatic measurement for concentration of ammonia contained in gas mixture | JP2442598 | 1998-02-05 | JPH10227733A | 1998-08-25 | KEIL GARY D; MORGAN RONALD G; TIPTON SHERYL A; SUPAK WAYNE A |
| PROBLEM TO BE SOLVED: To measure the content of ammonia in a gas mixture containing water soluble and water insoluble ammonia gases by applying the constitution that the ammonia gases contained in the gas mixture are dissolved in water and, then, a voltage signal corresponding to a pressure difference between the water and the gases is transmitted. SOLUTION: A water reservoir 30 receives water through a water filling solenoid valve 36, and supplies the water to a measurement vessel 20 via a feedwater pipe 33 while maintaining the prescribed water level. The measurement vessel 20 receives water via a water inlet solenoid valve 35 and a gas mixture from a gas introduction pipe 40 via an inlet solenoid valve 45 respectively by an amount enough to dissolve ammonia gas contained in the gas mixture. In addition, a differential pressure transducer 60 detects pressure due to water containing the dissolved ammonia at a high-pressure port. Also, the transducer 60 detects pressure due to the gas mixture at a low-pressure port. Furthermore, voltage signals are transmitted, depending on a differential pressure between the detected water and gas pressures. A recording means collects the voltage signals and converts the signals to ammonia concentration values. COPYRIGHT: (C)1998,JPO | ||||||
| 3 | Gas sorption tester for rapid screening of multiple samples | JP2008238956 | 2008-09-18 | JP2009075105A | 2009-04-09 | GROSS KARL |
| PROBLEM TO BE SOLVED: To provide a device which simultaneously determines gas sorption properties of a large number of material samples. SOLUTION: This device includes a switchable manifold of low-volume conduits and an array of sensors, where each low-volume conduit fluidly couples a single sample of gas sorbing material to a dedicated detector. The switchable manifold is also configured to fluidly couple the samples to a vacuum source or a dosing gas source. Because of a very low internal volume of the conduits, essentially all gas released from a particular sample is detected accurately by a corresponding detector, either through sorption of the released gas, by measuring pressure, or by other means. In this way, a very accurate measurement of the quantity of gas released by the sample is made. In one embodiment, the array of sensor includes hydride-based sensors, which contain a material that forms an optically and/or electrically responsive hydride upon exposure to hydrogen-containing gas. COPYRIGHT: (C)2009,JPO&INPIT | ||||||
| 4 | METHOD OF DETERMINING THE FILLING LEVEL OF A SOLID AMMONIA STORAGE MEDIUM IN AN AMMONIA STORAGE CONTAINER | EP11757781.7 | 2011-09-16 | EP2616795A1 | 2013-07-24 | ULRICH, Joachim, Quaade |
| A method of determining an average degree of saturation with ammonia (X) of a solid ammonia storage medium porous or not and capable of ad- or absorbing and desorbing ammonia reversibly in a storage container is described. A part of the volume (Vcon) of the container is occupied by gaseous ammonia of a pressure (p) and defines a free volume (Vfree). Ammonia flows out of the container with a flow (f). n pairs ((f i , p i ), (F i p i )) of flows (f i ), or accumulated flows (F i ), and pressures (p i ) are sampled at a sequence of points of time (t i ), i= 1....n and n = 2; an estimate volume value (V fit ) on the basis of the sampled pairs ((f i , p i ), (F i , p i )) is determined; and the degree of saturation with ammonia (X) is determined by applying a predetermined correlation (Rel) between a plurality of estimate volume values (V fit ) and a plurality of values of the average degree of saturation with ammonia (X) to the determined estimate volume value (V fit ). | ||||||
| 5 | Mechanism for oscillating a sample holder within a sample vessel | EP95305743.7 | 1995-08-17 | EP0703442A2 | 1996-03-27 | Bülow, Martin; Micke, André |
A mechanism used in connection with determining a time resolved interaction between a target substance, for instance, an adsorbent and at least one agent, for instance, an adsorbate capable of interacting with the target substance. In accordance with the method the target substance and agent(s) are introduced into a sample vessel. At the same time, the target substance is oscillated within the sample vessel without changing the volume of the sample vessel. A concentration of one or more components associated with the time resolved interaction as a function of time is measured by measuring chamber pressure and simultaneously performing a mass spectroscopical analysis of chamber content at discrete time intervals. The target substance is oscillated by a mechanical movement which oscillates a sample holder configured to hold the target substance. The movement has a finger-like member, preferably formed by welded steel bellows and a curved member rotating within the finger-like member so that motion of the finger-like member does not change chamber volume and therefore effect the pressure measurements that are to be made in accordance with the method. |
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| 6 | 動的吸放湿性評価装置、動的吸放湿性評価方法及び動的吸放湿性評価プログラム | JP2016186127 | 2016-09-23 | JP2018048983A | 2018-03-29 | 岸 敦史; 石原 康隆; 間宮 悟 |
| 【課題】サンプルの特性を幅広く解析することができる動的吸放湿性評価装置、動的吸放湿性評価方法及び動的吸放湿性評価プログラムを提供する。 【解決手段】サンプルが配置される測定室内のテストガス中の水蒸気濃度を調整し、測定室内のサンプル中の水分量を測定部で測定する。測定室内のテストガス中の水蒸気濃度を変化させたときに、その水蒸気濃度の変化に対する測定部で測定されるサンプル中の水分量の変化のずれBを算出する。算出したサンプル中の水分量の変化のずれBは、サンプルにおける吸脱着速度に対応している。したがって、サンプルの水分量だけでなく、吸脱着速度も解析することができるため、サンプルの特性を幅広く解析することができる。 【選択図】図4 |
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| 7 | Inspection system of process equipment for processing a substrate, and a sensor for this inspection system, as well as the inspection method of process equipment | JP2002070772 | 2002-03-14 | JP4251814B2 | 2009-04-08 | コルネリス ヨンケルス，オットー |
| 8 | Inspection system for substrate processing process apparatus, sensor for inspection system and inspection method for process apparatus | JP2002070772 | 2002-03-14 | JP2003045954A | 2003-02-14 | JONKERS OTTO CORNELIS |
| PROBLEM TO BE SOLVED: To allow inspection of the inside of a process apparatus at any time and measurement of the inside of a process chamber without disassembling the process chamber. SOLUTION: The present invention relates to an inspection system for a process apparatus which processes a substrate such as a semiconductor wafer, a flat panel display or the like. The system is provided with a wireless sensor capable of inspecting the inside of the process apparatus. The sensor is provided with a transmission unit for transmitting a signal to a receiver disposed outside the process apparatus during inspection of the inside of the process apparatus. The wireless sensor is disposed on a supporting body which is of substantially the same size as the substrate to be processed. COPYRIGHT: (C)2003,JPO | ||||||
| 9 | DYNAMIC MOISTURE ABSORPTION-DESORPTION PROPERTY EVALUATION APPARATUS, METHOD FOR EVALUATING DYNAMIC MOISTURE ABSORPTION-DESORPTION PROPERTY , AND DYNAMIC MOISTURE ABSORPTION-DESORPTION PROPERTY EVALUATION PROGRAM | EP17191813.9 | 2017-09-19 | EP3299795A1 | 2018-03-28 | Kishi, Atsushi; Ishihara, Yasutaka; Mamiya, Satoru |
A water vapor concentration in a test gas in a measurement chamber in which a sample is disposed is adjusted, and a moisture amount of the sample in the measurement chamber is measured by a measurement unit. When the water vapor concentration in the test gas in the measurement chamber is changed, a shift B in change of the moisture amount of the sample measured by the measurement unit, from change of the water vapor concentration in the test gas, is calculated. The calculated shift B in the change of the moisture amount of the sample corresponds to an adsorption-desorption rate of the sample. Thus, it is possible to analyze not only the moisture amount of the sample but also the adsorption-desorption rate of the sample, so that characteristics of the sample can be widely analyzed.
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| 10 | Gas sorption tester for rapid screening of multiple samples | EP08164140.9 | 2008-09-11 | EP2040071A2 | 2009-03-25 | Gross, Karl |
An apparatus determines gas sorption properties of a large number of material samples simultaneously. The apparatus includes a switchable manifold of low-volume conduits and an array of sensors, where each low-volume conduit fluidly couples a single sample of gas-sorbing material to a dedicated detector. The switchable manifold is also configured to fluidly couple the samples to a vacuum source or a dosing gas source. Because of the very low internal volume of the conduits, essentially all gas released from a particular sample is accurately detected by the corresponding detector, either through sorption of the released gas, by measuring pressure, or by other means. In this way, a very accurate measurement of the quantity of gas released by the sample is made. In one embodiment, the array of sensors includes hydride-based sensors, which contain a material that forms an optically and/or electrically responsive hydride upon exposure to hydrogencontaining gas.
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| 11 | DYNAMIC MOISTURE ABSORPTION-DESORPTION PROPERTY EVALUATION APPARATUS | US15711001 | 2017-09-21 | US20180088015A1 | 2018-03-29 | Atsushi Kishi; Yasutaka Ishihara; Satoru Mamiya |
| A water vapor concentration in a test gas in a measurement chamber in which a sample is disposed is adjusted, and a moisture amount of the sample in the measurement chamber is measured by a measurement unit. When the water vapor concentration in the test gas in the measurement chamber is changed, a shift B in change of the moisture amount of the sample measured by the measurement unit, from change of the water vapor concentration in the test gas, is calculated. The calculated shift B in the change of the moisture amount of the sample corresponds to an adsorption-desorption rate of the sample. Thus, it is possible to analyze not only the moisture amount of the sample but also the adsorption-desorption rate of the sample, so that characteristics of the sample can be widely analyzed. | ||||||
| 12 | Mitigation of gas memory effects in gas analysis | US11983128 | 2007-11-06 | US07810376B2 | 2010-10-12 | Serguei Koulikov |
| The gas absorption/adsorption memory effect in gas analysis can be reduced by controlling gas flow conditions such that the partial pressure of the analyte of interest is held constant, if the measured analyte concentration is within a predetermined range. Keeping the analyte partial pressure constant is helpful for mitigating the memory effect because changes in analyte absorption/adsorption rates tend to be driven by changes in analyte partial pressure. The memory effect can also be mitigated by performing concentration measurements at two or more different gas flow conditions, and employing a mathematical model to estimate true concentration and “memory effect” contributions to measured concentrations at one or more of the flow conditions. The mathematical model can be based on an assumption that the true analyte concentration is independent of flow rate or pressure, while the “memory effect” contribution to measured concentration is inversely proportional to flow rate or pressure. | ||||||
| 13 | Method and apparatus for measuring gas sorption and desorption properties of materials | US10440069 | 2003-05-17 | US07429358B1 | 2008-09-30 | Karl J. Gross |
| The invention relates to a method and an apparatus (herein referred to as a “gas sorption/desorption analyzer”) for measuring the gas sorption properties of substances (for example hydrogen sorption by metal alloys). Measurements include: Pressure Composition Temperature isotherm (PCT), Kinetic, Cycle-life, and density. Measurements are made by sorption of aliquots of gas to or from a sample of the substance. The amount of gas in each aliquot is determined from the gas pressure and temperature in calibrated reservoir volumes. The apparatus comprises components rated for operation up to 200 atm, a plurality of sensors covering a broad pressure range, and minimized volumes to enable accurate measurements of small samples. Aliquot pressures are controlled using a feed-back controlled pressure regulator that can also be used for constant pressure sorption measurements. The gas temperature is regulated using a temperature controlled enclosure. The apparatus also comprises a plurality of safety and failsafe mechanisms. | ||||||
| 14 | Inspection system for process devices for treating substrates, sensor intended for such inspection system, and method for inspecting process devices | US10099870 | 2002-03-14 | US20020148307A1 | 2002-10-17 | Otto Cornelis Jonkers |
| The invention relates to an inspection system for process equipment for treating substrates, such as, for instance, semiconductor wafers or flat panel displays. The system is provided with a wireless sensor with which the interior of the process device can be inspected. The sensor is provided with a transmitter to transfer a signal, during inspection of the interior of the process device, to a receiver disposed outside the process device. The wireless sensor is arranged on a support having substantially the same dimensions as the substrates to be treated. | ||||||
| 15 | Apparatus for automated measurement of ammonia concentration in a gas mixture | US799754 | 1997-02-11 | US5767383A | 1998-06-16 | Gary D. Keil; Ronald G. Morgan; Sheryl A. Tipton; Wayne A. Supak |
| A process for automated measurement of ammonia in a gas mixture containing ammonia gas and one or more water-insoluble gases includes providing a water reservoir adapted for supplying water therefrom through a first solenoid valve and providing a measurement vessel adapted for receiving water. The vessel is adapted for draining the water therefrom through a second solenoid valve. The vessel is also adapted for receiving the gas mixture through a third solenoid valve and purging the gas mixture from the vessel through a fourth solenoid valve. The vessel is adapted for maintaining the gas in the vessel and receiving water thereinto in an amount sufficient to dissolve the ammonia gas contained in the gas mixture, into the water, and allowing a differential pressure between the gas mixture and the water containing dissolved ammonia to be measured. The process also includes providing a measurement vessel adapted for allowing height of water within the vessel to be measured, providing means for measuring height of water within measurement vessel, and providing recording means for converting the measured height signal to an ammonia concentration value. | ||||||
| 16 | Device for measuring swelling of material | US3796090D | 1971-07-14 | US3796090A | 1974-03-12 | NAKAJIMA Y; OHTANI K |
| A cam operated cyclically shifted holder moves a weight toward and away from an underlying material to measure the degree of swelling of liquid absorbed by the material by means of a device which measures the pressure acting on the material due to the oscillating weight.
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| 17 | Carbon dioxide analyzer | US31279363 | 1963-09-30 | US3266869A | 1966-08-16 | DENGLER OSKAR E |
| 18 | Automatic electronic buret | US76219058 | 1958-09-19 | US3018654A | 1962-01-30 | SAUL GORDON; CLEMENT CAMPBELL |
| 19 | Apparatus for analysis of gas | US50494843 | 1943-10-04 | US2397846A | 1946-04-02 | DIETERT HARRY W |
| 20 | Gas analysis apparatus | US36499640 | 1940-11-09 | US2351532A | 1944-06-13 | MCMILLAN WALLACE A |
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