子分类：
| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 121 | 압력센서 | KR1020110086173 | 2011-08-29 | KR1020130023430A | 2013-03-08 | 정익승 |
| PURPOSE: A pressure sensor is provided to generate a uniform magnetic force line from the N-pole to the S-pole regardless of a change in an installation position of a permanent magnet as a shape structure of the permanent magnet is formed into a cylindrical form. CONSTITUTION: A pressure sensor(1a) comprises a housing unit(10), a diaphragm(20), an elevating member(25), a permanent magnet(30a), and a detecting member(40). The housing unit has a flexible space for the inflow and the outflow of fluid in inside and is composed of a base(11) and a cap(12). The diaphragm is mounted inside the housing unit and moved upward and downward by an elastic action of an elastic member(35) and a pressing action of the fluid flowing into the space. The elevating member is seated in an upper center of the diaphragm while the elastic member is attached to a magnet joining rod(26) and interlocked with the lifting operation of the diaphragm caused by the pressing action and elastic action, thereby being moved upward and downward in an identical direction. The permanent magnet is fixed to the magnet joining rod and interlocked to the elevating member, thereby being moved upward and downward in the identical direction when the diaphragm is moved upward and downward. The detecting member is arranged in the one upper part of the base of the housing unit adjacent to an operation section where the permanent magnet moves. | ||||||
| 122 | 정전용량형 압력센서 | KR1020110049458 | 2011-05-25 | KR1020110129357A | 2011-12-01 | 구와하라아키라; 하타이타다케히사; 기시다소우타로 |
| PURPOSE: A capacitive pressure sensor is provided to prevent the deformation of a diaphragm by thermal stress, which occurs by the thermal expansion coefficient of a sensor and the thermal expansion coefficient of a fixing member. CONSTITUTION: A capacitive pressure sensor(100) comprises a body(2), a diaphragm structure(3), and a fixing member(4). The body is fixed so that a fixed electrode is exposed to one end. The diaphragm structure is bonded to form a closed space with the body on one end of the body. The fixing member is bonded to the diaphragm structure to protect the water pressure unit of the diaphragm structure. The fixing member is mounted on a flow-path forming member, which forms a flow path(L). The fixing member guides fluid to the water pressure unit. The diaphragm structure comprises a body(31), a first ring member(32), and a second ring member(33). | ||||||
| 123 | 질량 유량계 및 매스 플로우 컨트롤러 | KR1020090127950 | 2009-12-21 | KR1020100075740A | 2010-07-05 | 이소베야스히로; 호리노우치오사무; 다나카유키; 야마구치마사오; 후루카와유키마사 |
| PURPOSE: A mass flowmeter and a mass flow controller are provided to minimize the error of a measured flow rate due to the pressure of a first side and to improve the flow measurement accuracy of the mass flowmeter by correcting the measured flow rate with the coefficient of each sample gases. CONSTITUTION: A mass flowmeter(100) comprises a flow rate calculation unit(42) which acquires an output signal from a sensor unit including a heat-sensitive resistor(41) in a flow path wherein sample gas(G) flows and produces the measured flow rate of the sample gas, a pressure measurement unit(43) which measures the pressure of a first side in the flow path, and a flow rate correction unit(44) which uses the pressure of the first side acquired with the pressure measurement part and the gas coefficient according to the sample gas and corrects the measured flow rate acquired from the flow amount calculation part. | ||||||
| 124 | 화학기상증착설비의 배기장치 | KR1020040058977 | 2004-07-28 | KR1020060010320A | 2006-02-02 | 김민규 |
| 본 발명은 생산성을 높일 수 있는 화학기상증착설비의 배기장치를 개시한다. 그의 장치는 챔버와 연통하는 배기관을 통해 잔류 가스를 펌핑하여 배기 펌프와, 상기 배기 펌프와 상기 챔버 사이의 상기 배기관에 설치되어 상기 챔버 내부의 압력을 조절하는 자동압력조절 밸브와, 상기 자동압력조절 밸브에 의해 조절되는 상기 챔버 내부의 압력을 감지하는 바라트론 센서와, 상기 챔버 내부의 압력을 감지하여 상기 바라트론 센서의 동작 불량을 파악하기 위해 상기 챔버와 상기 바라트론 센서 사이의 상기 배기관에 설치되는 보조 압력 센서와, 상기 바라트론 센서와 보조 압력 센서 각각의 압력감지 신호를 입력받아 상기 자동압력조절 밸브를 제어하는 제어 신호를 출력하는 자동압력조절 제어부를 구비하여 이루어진다.
피라니 게이지(pirani gage), 바라트론 센서(baratron sensor) |
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| 125 | 전자식 압력발신기의 동파 방지장치 | KR1020010067137 | 2001-10-30 | KR1020030035179A | 2003-05-09 | 고락중; 조성철; 황영택; 김선덕 |
| PURPOSE: An apparatus for preventing an electronic pressure transmitter from being frozen to break is provided to prevent damage of a diaphragm by an increase in pressure due to an increase in volume of a measuring fluid by freezing. CONSTITUTION: Cylindrical spool guide casings(35,38) are combined with perforation holes of casing covers(51,52) connected to a side of an amplifier of an electronic pressure transmitter. Spools(45,50) have rear ends inserted into front ends of the spool guide casings through the open front ends of the spool guide casings and have front end surfaces adhered to the perforation holes of the casing covers, elastically opening and shutting the perforation holes. | ||||||
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