OFFSET CORRECTION METHODS AND ARRANGEMENT FOR POSITIONING AND INSPECTING SUBSTRATES |
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| 申请号 | PCT/US2007078578 | 申请日 | 2007-09-14 | 公开(公告)号 | WO2008042581B1 | 公开(公告)日 | 2008-12-11 |
| 申请人 | LAM RES CORP; CHEN JACK; BAILEY ANDREW D III; MOORING BEN; CAIN STEPHEN J; | 发明人 | CHEN JACK; BAILEY ANDREW D III; MOORING BEN; CAIN STEPHEN J; | ||||
| 摘要 | A bevel inspection module for capturing images of a substrate is provided. The module includes a rotational motor, which is attached to a substrate chuck and is configured to rotate the substrate chuck thereby allowing the substrate to revolve. The module further includes a camera and an optic enclosure, which is attached to the camera and is configured to rotate, enabling light to be directed toward the substrate. The camera is mounted from a camera mount, which is configured to enable the camera to rotate on a 180 degree plane allowing the camera to capture images of at least one of a top view, a bottom view, and a side view of the substrate. The module yet also includes a backlight arrangement, which is configured to provide illumination to the substrate, thereby enabling the camera to capture the images, which shows contrast between the substrate and a background. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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