专利汇可以提供PRODUCTION METHOD FOR FORMING AN ANTIBACTERIAL FILM ON THE SURFACE OF AN OBJECT专利检索,专利查询,专利分析的服务。并且A production method combining cathode arc and magnetron sputtering methods to form an antibacterial film on the surface of an object. Inside the vacuum chamber, both a cathode arc target source and a magnetron sputtering target source are configured. On the cathode arc target source, at least one of a zirconium, titanium, or chromium target is installed. On the magnetron sputtering target source, a silver target is installed. Argon and nitrogen are filled into the vacuum chamber to respectively ionize the silver target and one of the zirconium target, titanium target, or chromium target. Remote control is used to adjust the ionization proportion between one of the zirconium, titanium, or chromium target and the silver target to be 90-99%:1-9%. The surface of the object is formed with one of the zirconium nitride-silver mixed antibacterial film, titanium nitride-silver mixed antibacterial film, or chromium nitride-silver mixed antibacterial film.,下面是PRODUCTION METHOD FOR FORMING AN ANTIBACTERIAL FILM ON THE SURFACE OF AN OBJECT专利的具体信息内容。
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1. Field of the Invention
The present invention relates generally to a production method to form an antibacterial film on the surface of an object, and more particularly to an innovative one combining cathode arc method and magnetron sputtering method.
2. Description of Related Art Including Information Disclosed Under 37 CFR 1.97 and 37 CFR 1.98
Based on currently known technologies in the coating industry, to provide both antibacterial and aesthetic effect on the surface of an object, a decorative film can be formed initially on the surface of the object. However, as this decorative film is only for the demand of aesthetic effect, it usually does not have antibacterial property. In such cases, it is usually necessary to further form an antibacterial film over the decorative film. To reflect the aesthetic effect of the decorative film, the antibacterial coating must have transparency. However, the limited transparency of the antibacterial film may still damage the aesthetic effect of the decorative film, and the antibacterial coating may be easily worn and will lose its antibacterial effect. Therefore, it is truly necessary to provide an innovative antibacterial film as a break-through technology to overcome the above problems.
If physical vacuum vapor deposition is adopted to form the antibacterial film, the problems relating to the above known coating method can be solved. Methods of physical vacuum vapor deposition mainly include thermal evaporation, magnetron sputtering, hollow cathode evaporation, cathode arc vapor deposition, and electron-beam evaporation etc; and coating objects cover metals, ceramics, plastics, textiles, glass etc. Therefore, there is a wide scope of application.
Each of the physical vacuum vapor deposition methods described above has their respective advantages and disadvantages in actual application. For example, comparing to magnetron sputtering method, cathode arc vapor deposition method features higher forming speed, but the coating surface is coarse and has the shortcomings of imperfect fineness and evenness. While magnetron sputtering method can offer even coating and high density, but the forming efficiency is lower than cathode arc vapor deposition method.
Thus, to overcome the aforementioned problems of the prior art, it would be an advancement if the art to provide an improved structure that can significantly improve the efficacy.
Therefore, the inventor has provided the present invention of practicability after deliberate design and evaluation based on years of experience in the production, development and design of related products.
The production method combining cathode arc method and magnetron sputtering method to form an antibacterial film on the surface of an object disclosed in the present invention is mainly characterized by the configuration of a cathode arc target source and a magnetron sputtering target source inside the vacuum chamber of the vacuum coating equipment, and the installation of a zirconium target, titanium target or chromium target on the cathode arc target source, and a silver target on the magnetron sputtering target source to go with the ionization process of argon and nitrogen. Comparing to the prior art, the present invention can take advantage of the high forming speed of the cathode arc vapor deposition method, so that the object can be quickly coated with one of zirconium nitride, titanium nitride, or chromium nitride which accounts for a higher percentage in the antibacterial film. On the other hand, due to the even filming and high density coating of the magnetron sputtering method, the silver ions can be evenly and delicately distributed on the various areas of the antibacterial film to fill up the fine pores of the above coarse film. Hence, the present invention can provide both high production efficiency and good coating quality. The practical advancement is obvious.
Although the invention has been explained in relation to its preferred embodiment, it is to be understood that many other possible modifications and variations can be made without departing from the spirit and scope of the invention as hereinafter claimed.
The detailed production process of cathode arc vapor deposition method and magnetron sputtering method mentioned in the content of this embodiment are described below with the following example.
1. Inside the vacuum chamber 06, both cathode arc target source 10 and magnetron sputtering target source 20 are configured;
2. On the cathode arc target source 10, install at least one of zirconium target 11, titanium target 12, or chromium target 13;
3. On the magnetron sputtering target source 20, install silver target 21;
4. Fill argon and nitrogen (as L1, L2 marked in
5. Through remote control, make the ionization proportion between one of the zirconium target 11, titanium target 12, or chromium target 13 and the silver target 21 as follows:
6. After completion, on the surface of the object 07, one of zirconium nitride 111-silver 14 mixed antibacterial film 08, titanium nitride 121-silver 14 mixed antibacterial film 08, or chromium nitride 131-silver 14 mixed antibacterial film 08 is formed (only marked in
As described above, said cathode arc method (also called vacuum arc method) is one of existing physical vacuum vapor deposition methods. It is mainly a coating technology to apply vacuum arc light discharge on the evaporation source to release and emit the vapor particles of the target material from the surface of the cathode target. Most of the vapor particles will become ions and droplets. Ions are the most important element in the production method, the ionized vapor of the target material is accelerated by the negative bias relative to the vacuum chamber and the anode, and collides with and deposits on the substrate. On the other hand, the magnetron sputtering method is based on the ion sputtering principle. When energetic particles attack the solid surface, atoms and molecules will exchange motion energy with the energetic particles and fly out from the solid surface. Such a phenomenon is called “sputtering”. Firstly, an electric field is applied to generate electrons between the two electrodes. The accelerated electrons will collide with the inert gases pre-filled into the coating chamber to make them positively charged. The positively charged particles will be attracted by the cathode (target material) and collide with the cathode. The incident ions (usually argon is used) acquire motion energy under the influence of the electric field, and collide with the atoms on the surface of the target material. After the collision, these atoms obtain the momentum transferred from the incident ions, and with the momentum acquired from the incident ions, the impacted atoms on the surface of the target material will squeeze the atoms under the surface and make them move. The squeeze of multiple layers of atoms under the surface of the target material will generate an acting force perpendicular to the surface of the target material and knock out the atoms on the surface. The knocked-out atoms will finally deposit on the substrate (anode) to form a thin film.
Meanwhile, the color of the antibacterial film 08 will have the following results based on different cathode arc target sources 10 adopted in the production process:
It is to be noted that, in actual application, the object 07 mentioned in the present invention can widely include medical products, sanitary products, furniture, decorative products, lock and hardware products, hand tool products, clocks and glasses etc. Through the above-mentioned coating process, the product surface can form a mixed antibacterial film 08.
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