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Acoustic surface wave resonator

阅读:69发布:2023-03-22

专利汇可以提供Acoustic surface wave resonator专利检索,专利查询,专利分析的服务。并且A piezoelectric resonator including body of piezoelectric material capable of propagating acoustic surface waves in response to electrical signals applied thereto. The surface waves are confined to a predetermined area on the surface of the piezoelectric material by bonding to the piezoelectric material a layer of acoustically transmissive material having an acoustic transmission velocity lower than the acoustic transmission velocity of the piezoelectric material. The dimension of the resultant laminate along the direction of propagation of the acoustic surface waves determines the resonant frequency of the laminate. The electrical characteristics of the resonant laminate are similar to those of quartz crystals commonly used in oscillators and filters.,下面是Acoustic surface wave resonator专利的具体信息内容。

1. An acoustic resonator having a resonant frequency and responsive to signals applied thereto including in combination, a stress element having a first acoustic wave propagation velocity, transducer means coupled to said stress element for exciting said stress element to produce acoustic surface waves that propagate in predetermined directions in response to said signals, and an acoustic element having a second acoustic wave propagation velocity acoustically coupled to said transducer means and bonded to said stress element to form a laminate having predetermined boundaries, said predetermined boundaries defining a predetermined propagation length therebetween in the direction of propagation of said surface waves, said acoustic element and said stress element cooperating to confine said acoustic surface waves within the area of the junction of said acoustic element and said stress element of said laminate, said predetermined boundaries being spaced apart a distance generally equal to an odd integral multiple and one half acoustic wavelengths at the resonant frequency and positioned perpendicular to the direction of propagation of said waves for reflecting said acoustic waves to form an acoustically resonant structure in said laminate between said boundaries, said propagation length determining the resonant frequency of said resonantor.
2. An acoustic resonator having a resonant frequency and responsive to electrical signals applied thereto including in combination, a layer of piezoelectric material having a first acoustic wave propagation velocity, and transducer means coupled to said piezoelectric material for exciting said piezoelectric material to produce acoustic surface waves that propagate in predetermined directions in response to said electrical signals, a layer of acoustic material having a second acoustic wave propagation velocity different than said first acoustic wave propagation velocity acoustically coupled to said transducer means and bonded to said piezoelectric material to form a laminate having predetermined boundaries defining a predetermined propagation length in the direction of propagation of said waves therebetween, said layer of piezoelectric material and said layer of acoustic material cooperating to confine said acoustic surface waves within the area of the junction of said layer of piezoelectric material and said acoustic layer of said laminate, said boundaries being spaced apart a distance generally equal to an odd integral multiple of one half acoustic wavelengths at the resonant frequency and positioned perpendicular to said direction of propagation for reflecting said acoustic waves to form an acoustically resonant structure between said boundaries, said propagation length between said boundaries determining the resonant frequency of said resonator.
3. An acoustic resonator according to claim 16, wherein said transducer includes a plurality of parallel interdigitated fingers, and wherein said boundaries are parallel to said fingers.
4. An acoustic resonator according to claim 2 wherein said layer of said piezoelectric material is a substrate and said layer of said acoustic material is deposited thereon, said deposited layer and said substrate each having a predetermined length in the direction of wave propagation, said length in the direction of propagation of said deposited layer being smaller than said length in the direction of propagation of said substrate and determining said propagation length of said laminate.
5. An acoustic resonator according to claim 4 wherein said acoustic material is amorphous silicon dioxide and said piezoelectric material is quartz.
6. An acoustic resonator according to claim 4 wherein said acoustic material is amorphous silicon dioxide and said piezoelectric material is aluminum nitride.
7. An acoustic resonator according to claim 4 wherein said transducer means is deposited on said substrate of piezoelectric material, and said layer of acoustic material is deposited over said transducer means.
8. An acoustic resonator according to claim 4 wherein said deposited layer has a thickness of less than two acoustic wavelengths.
9. An acoustic resonator according to claim 8 wherein said first acoustic wave propagation velocity is greater than said second acoustic wave propagation velocity.
10. An acoustic resonator according to claim 2 wherein said layer of said acoustic material is a substrate and said layer of said piezoelectric material is deposited thereon, said substrate and said deposited layer each having a predetermined length in the direction of wave propagation, said length in the direction of wave propagation of said deposited layer being smaller than said length in the direction of wave propagation of said substrate and determining said propagation length of said laminate.
11. An acoustic resonator according to claim 10 wherein said transducer means are deposited on said substrate of acoustic material, and said layer of piezoelectic material is deposited over said transducer means.
12. An acoustic resonator according to claim 10 wherein said deposited layer has a thickness of less than two acoustic wavelengths.
13. An acoustic resonator according to claim 12 wherein said second acoustic wave propagation velocity is greater than said first acoustic wave propagation velocity.
14. An acoustic resonator according to claim 2 wherein one of said layers is annular and wherein said propagation length of said resonator is the radial distance between the annular boundaries of said layers.
15. An acoustic resonator as recited in claim 2 wherein said transducer means is a single transducEr positioned between said layers and between said boundaries for receiving the waves reflected by said boundaries, said transducer being responsive to the waves reflected by said boundaries for altering the electrical impedance to the electrical signals applied to said transducer, said electrical impedance having a minimum value at said resonant frequency.
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