Optical semiconductor device

阅读:741发布:2021-07-25

专利汇可以提供Optical semiconductor device专利检索,专利查询,专利分析的服务。并且PURPOSE:To form a p-i-n photodiode in the direction lateral to a wafer, and to integrate the photodiode as a planar type together with a MES-FET by connecting a gate for the MES-FET to either one of one conduction type region or a reverse conduction type region and a source to the other. CONSTITUTION:A p type region 12 and an n type region 13 in a p-i-n photodiode section PD are formed through an ion implantation method or a diffusion method or the like. An n type active region 15 in a MES-FET section Q is formed at the same time as the n type region 13 in the p-i-n photodiode PD. A gate 17 for the MES-FET is connected to either one of the p type region or the n type region and a source 15 to the other. Consequently, the p-i-n photodiode and the MES-FET take a planar type in which they are arranged on the same plane on the same substrate in the lateral direction. Accordingly, since there is no stepped section, wiring is facilitated, and a manufacturing process can be simplified.,下面是Optical semiconductor device专利的具体信息内容。

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