专利汇可以提供Inspection-position control system of measured objects专利检索,专利查询,专利分析的服务。并且PURPOSE: To make possible the installation of measuring objects in desired positions by operating the installation errors of the center of a reference spherical face from each displacement position having been measured and the center of rotation, moving the measuring object based on this through electromagnetic action and aligning both centers.
CONSTITUTION: A measuring lens 20 is held to a lens holding base 31 and is displaceable in the direction of θ axis 24. A voice coil 42 is provided to the base 31 and the base 31 displaces in the axis 24 direction when 42 is energized. With the vertex (reference spherical face 57) of the lens 20 being aligned to a reference plane 30 by means of a probe 23 and a coarse adjusting screw 41, the lens 20 is turned about α axis 21 and the displacement quantities of the probe 23 at respective rotating angles α
1-n are inputted to a computer 56 and are compared with the design value of each angle αi which has beforehand been stored, whereby installation errors ε are detected. The errors are voltage-converted with a D/A converter 60 and the error correcting currents are supplied to the coil 42 to be minutely displayed in the arrow 46 direction by electromagnetic force and be held in the position where the center of the curvature of the reference spherical face 57 aligns to the central axis 21 of the actual rotation, thus the precise position adjustment may be accomplished with the simple constitution.
COPYRIGHT: (C)1979,JPO&Japio,下面是Inspection-position control system of measured objects专利的具体信息内容。
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