专利汇可以提供OPTICAL MEASURING SENSOR专利检索,专利查询,专利分析的服务。并且An optical detector may include an aperture, at least two photodetectors, and a measuring arrangement to quantify light detected at the photodetectors after passing through the aperture without the need for a lens. The aperture may be positioned between a light source and the two photodetectors to allow light from a light source to pass through the aperture to the photodetectors. The photodetectors may include PIN junction photodiodes and may be electrically isolated from each other, positioned next to each other in a side-by-side configuration, and then aligned with the aperture so that a proportion of the quantified light detected at the photodetectors changes as an angle of light from the light source incident to the aperture changes. Optical detectors and methods are provided.,下面是OPTICAL MEASURING SENSOR专利的具体信息内容。
We claim:
Optical sensing technology has been used to locate and track movement of objects in multiple dimensions. Traditional optical position sensitive detectors use optical lenses to focus incident light on a particular area of the detector to determine an angular location of an object emitting or reflecting the light. The lenses focus and map light rays emitting from the object to a particular location on the surface of the sensor. The angular location of the object emitting the light may be calculated from the mapped location of the light rays at the sensor and the properties of the lens. While lenses were needed to focus the light on a particular area of the detector in order to measure the properties of the light emitted from a light source, the use of lenses in these detectors has several limitations.
First, optical lenses are required to be positioned at a height at least equal to the focal length of the lens above the light detecting surface. This required separation between the lens and the light detecting surface consumes extra space in electronic devices, which makes it difficult to reduce the size of the device. Second, the lenses also represent a cost component of a detector.
Accordingly, the inventor perceives a need for a lens-less detector that is able to accurately detect and measure light to determine the position or track movement of an object emitting or reflecting light from a light source.
In an embodiment of the invention, an optical detector may include an integrated circuit having an aperture in a surface of the integrated circuit and at least two electrically isolated photodetectors, which may be aligned with respect to the aperture so that a quantity of the incident light from a light source detected at each of the photodetectors changes as an angle of the incident light changes with respect to the aperture. In some instances, the aperture and photodetectors may be monolithically manufactured into or on top of a single chip of silicon or other semiconductor to form the integrated circuit. In other instances, the aperture and photodetectors need not be part of an integrated circuit. In some instances, the optical detector may also include a measuring arrangement to quantify the angle of the incident light from a light source detected at the photodetectors after passing through the aperture.
The aperture may be included in a first surface of an integrated circuit forming the optical detector. The photodetectors may be embedded in the integrated circuit below the first surface. In some instances, the aperture may be monolithically constructed with the detectors to ensure precise alignment of the aperture and the photodetectors. Improving the precision of the alignment between the aperture and the photodetectors may improve the accuracy of the measured angular position of the light source. The detector has no need for an external lens.
In some instances, the surface of the integrated circuit having the aperture may be made from a metal or an opaque thin-film material. In these instances, a slit, opening, hole, or other absence of the metal or material may be provided to create the aperture. The aperture may be positioned between a light source and the photodetectors to allow light to pass through the aperture and reach the photodetectors.
The photodetectors may be electrically isolated from each other, positioned next to each other in a side-by-side configuration, and then aligned with the aperture so that a proportion of the light detected at the photodetectors changes as an angle of light incident to the aperture changes. There are many techniques for electrically isolating photodetectors positioned extremely close to each other. These techniques include using trenches, such as partial etchings and full isolation trenches, or junction isolation methods to electrically isolate the photodetectors from each other, though in other embodiments other insulators or techniques may be used.
The photodetectors may include PIN junction photodiodes having a lightly doped near intrinsic semiconductor region between the p-type and n-type semiconductor regions. The PIN junction photodiodes may be constructed so that an internal electric field due to bias as well as built-in potential forces cause essentially vertical motion of the photo-generated carriers. This may be accomplished with a high-resistivity epitaxial growth of silicon forming the PIN junction.
The measuring arrangement may include circuitry enabling the use of photocurrents to quantify the light detected at the photodetectors. Alternatively, the measuring arrangement may include circuitry enabling photodetector initiated changes to a resistance or conductivity parameter of a circuit to quantify the light detected at the photodetectors. Other techniques for quantifying the light detected at the photodetectors may also be used.
The surface of the integrated circuit may include an aperture in the shape of a slit, round hole, square hole, or other shape, such as a polygon, oval, or freeform shape.
The size and shape of the aperture and photodetectors may be selected to provide for varying shadows on each of the photodetectors as an angle of light originating from a light source incident to the aperture changes. The measuring arrangement may include circuitry to calculate this angle of light incident to the aperture from the quantified amount of light detected at the photodetectors.
In some instances where the surface of the integrated circuit containing the aperture is a metallic or other reflective medium, the edges of the aperture may be beveled to minimize reflections at an aperture edge that may erroneously cause the light to be reflected off the aperture edge and onto an incorrect light detecting surface of a photodetector. In some instances the beveled aperture edge may be directed away from the photodetector to cause the light striking the beveled edge to be reflected away from the photodetectors, though in other instances, the beveled aperture edge may be directed in an other direction.
The apertures 102 may be slits having a width s, and the apertures 102 may be positioned at a height h above the photodetectors 111 to 132. In some configurations, h may be less than 30 μm and in some space saving configurations, h may be less than 10 μm or even less than 1 μm. A medium that enables light to pass through it may be placed between one or more apertures 102 and the photodetectors 111 to 132. In some instances, the medium may be glass, including forms of glass used during semiconductor device fabrication. The width sof the photodetector may depend on an angular range requirement and h.
The angle of the light source may be calculated by measuring a relative proportion of photocurrents detected at each of the photodetectors, provided that the light from the light source is able to reach at least two of the photodetectors. When all of the light from the light source falls on only one detector it may not be possible to measure changes to the angle of the light source. The maximum angle θmax that may be measured may occur approximately at tan(θmax) ˜±s/h.
If light emitted from a light source is angularly distributed so that the emitted light reaches the photodetectors from multiple angles with intensity In(θ), then the average angular position of the emitted light may be calculated. Assuming SL(θ) and Sr (θ) are the respective responses of the left and right photodetectors to light at angle θ detected at the photodetectors, then the photocurrents measured by the left and rights photodetectors may calculated as:
However, the photocurrents calculated from both of these integrals may be equivalent to photocurrents generated from a “virtual” point light source at a centroid angle of the distribution. This centroid angle may be calculated from the measured photocurrents at the left and right photodetectors and used to calculate the equivalent centroid angle of the light source.
Each photodetector pair 111/112, 121/122, and 131/132 may have a total width L, the center of which may be aligned with a center of each respective aperture 102. In some embodiments, one or more of the centers of the photodetector pairs may be offset from the centers of their respective apertures and in the some other instances the amount of offset may vary for different photodetector pairs. The optical detectors may be configured so that the outputs of corresponding photodetectors in each of the photodetector pairs are coupled together to increase light collection efficiency. For example, the photocurrent outputs of the left most photodetectors 111, 121, and 131 in each photodetector pair may be coupled together to generate an aggregate current iL proportional to a aggregated detected amount of light at the left most photodetectors 111, 121, and 131. Similarly, the photocurrent outputs of each of the right most photodetectors 112, 122, and 132 in each photodetector pair may be coupled together to generate an aggregate current ir of the right most photodetectors 112, 122, and 132.
The integrated circuit surface 105 may be metallic, such as a metal interconnecting layer used in silicon integrated circuit manufacturing. The edges of the apertures 102 may be beveled, as shown in
In this example, a pair of first and second photodetectors may be associated with each of the apertures. For example, first and second photodetectors 111 and 112 are associated with a left-most aperture A 102, so that the incident light passing through aperture A 102 is detected at one or both of the two apertures 111 and 112. Similarly, first and second photodetectors 121 and 122 may be associated with the center aperture B 102, so that the incident light passing through aperture B 102 is detected at one or both of those two apertures 121 and 122. Finally, first and second photodetectors 131 and 132 may be associated with the right-most aperture C 102, so that the incident light passing through aperture C 102 is detected at one or both of those two apertures 131 and 132. Each of the photodetectors 111 to 132 may be electrically isolated and separated from the others by a trench 103. Each of the photodetectors 111 to 132 and apertures A, B, and C, 120 may also be arranged in parallel to each other in the optical detector.
As the angle and direction of the incident light changes from the left side of the figure above the surface 105 to the right side above the surface 105 (or vise versa), the projection of the incident light through the apertures A, B, and, C 102 may also change from initially being entirely projected onto the right most detectors 112, 122, and 132 in each detector pair, to being projected less on the right most detectors 112, 122, and 132, and more on the left most detectors 111, 121, and 131 in each detector pair until the incident light is projected entirely on the left most detectors 111, 121, and 131.
The angle of the incident light may be calculated by comparing the photocurrents iL and ir, which may be proportional to the detected light at the left and the right photodiodes respectively after the incident light passes through the aperture. The ability to calculate the angle of the incident light from a light source 101 may be dependent on the ability to detect light at both detectors in the pair as the angle calculation depends on the proportion of light reaching each detector in the pair.
As shown in the plots, the transfer functions relating the angle of the incident light to the ratio r may be determined by the relative values of three parameters: height h between the photodetector and the aperture, width L of each photodetector pair, and the slit width s. In
In different embodiments, these parameters may be varied depending on the application. For example, in some applications, the height h may be selected to be between 0 and 10 μm and the detector pair widths L may be selected to be greater than h and/or less than 5h. In the case where the height h is 0, the integrated circuit surface having the aperture may be positioned directly on top of the photodetectors. The proportion of light detected at each of the photodetectors may still change as the angle of the incident light changes because the light reaching the detectors is absorbed over a certain depth within the photodetectors. This absorption depth within the photodetectors may be several microns deep. Thus, even though the integrated circuit surface having the aperture may be placed directly on top of the photodetectors, the light reaching the photodectors may still travel an additional depth within the photodetector before the light is fully detected. The angle of the incident light may be calculated by comparing the photocurrents iL and ir, which may be proportional to the detected light at the left and the right photodiodes respectively after the incident light passes through the aperture.
The light collection efficiency may be increased by grouping many detector pairs together to aggregate the photocurrents measured at each detector pair. While increase the number of detector pairs may increase the total measured photocurrents and the light collection efficiency, as the number of detector pairs increases in a fixed space, the width L of each detector pair may be reduced. Reducing the width L may narrow the range of angles of the light source measurable by each detector. Such a reduction may cause light arriving at less oblique angles to reach not only just one of detectors in each pair, but also an opposite detector of a next adjoining detector pair, leading to erroneous results.
This effect is shown in
A center of each group of four side-by-side photodetectors may be aligned with a center of its respective associated aperture 302. For example, the center of side-by-side photodetectors 311-314 may be aligned with a center of aperture A 302, and so on. In other embodiments, the centers of the side-by-side photodetectors may offset from their respective aperture centers.
The angle of light in a first direction, such as the x direction may be determined by comparing the photocurrents from the left most photodetectors in each group (in this instance the first and third photodetectors 311, 313, 321, 323, 331, 333, 341, 343) to the right most photodetectors in each group (in this instance the second and fourth photodetectors 312, 314, 322, 324, 332, 334, 342, 344).
The angle of light in a second direction, such as the y direction may be similarly determined by comparing the photocurrents from the upper most photodetectors in each group (in this instance the first and second photodetectors 311, 312, 321, 322, 331, 332, 341, 342) to the lower most photodetectors in each group (in this instance the third and fourth photodetectors 313, 314, 323, 324, 333, 334, 343, 344).
The left most array 430 may have its photodetectors 410 and apertures A-C 402 arranged in a vertical (y direction) configuration 430 in order to measure an angle of the incident light in the x direction passing through apertures A-C 402. An aggregated photocurrent iL may be generated from each of the photodetectors 410 on the left of apertures A, B, and C 402 and an aggregated photocurrent ir may be generated from each of the photodetectors 410 on the right of apertures A, B, and C 402 based on the incident light reaching each of the respective photodetectors 410. The photocurrents may then be used to calculated the angle of the light in the horizontal x direction as discussed previously.
The right most array 440 may have its photodetectors 410 and apertures A-C 402 arranged in a horizontal (x direction) configuration 430 in order to measure an angle of the incident light in the y direction passing through apertures D-F 402. An aggregated photocurrent it may be generated from each of the photodetectors 410 above apertures D, E, and F 402 and an aggregated photocurrent ib may be generated from each of the photodetectors 410 below apertures D, E, and F 402 based on the incident light reaching each of the respective photodetectors 410. The photocurrents may then be used to calculated the angle of the light in the vertical y direction as discussed previously. The photodetectors 410 in each of the arrays as well as the arrays themselves may be electrically isolated from each other.
In different embodiments, each of the arrays 501 to 504 may have similar or different photodetectors, apertures, or offsets. Some arrays may have photodetectors and/or apertures of different sizes, shapes, offsets and/or positions. For example, a multi-array detector may have some arrays similar to those shown in
In some instances, the proportion of incident light detected at the plurality of photodetectors may be identified without a use of a lens and/or the positional information of the incident light may be calculated without a use of a lens. The incident light may also pass through the aperture and reach the plurality of photodetectors without passing through a lens, though the incident light may passes through a medium between the aperture and the plurality of photodetectors before reaching the plurality of photodetectors. The medium may be a solid or liquid (such as a polymer or glass), or gas (such as air) that allows light to pass through the medium and need not alter a directional characteristic of light passing through it.
A processor 744 may the be used to calculate an angle θ1 and/or θ2 of incident light from each of the light sources 711 and/or 712 in at least one dimension, depending on the sensor configuration. For example, if a one dimensional sensor configuration is used, then the angle of incident light from each light source with respect to the one dimension may be calculated. If a two dimensional sensor configuration is used, then angle of incident light from each light source may be calculated with respect to each of the two dimensions. The calculated angles of the incident light may then be used to determine a position of the sensors with respect to the light source as previously discussed.
Thus, if two light sources 711 and 712 are used with a one dimensional sensor, or one light source is used with a two dimensional sensor, then two dimensional position information, such as an x,y coordinate, of the detector with respect to the light source may be determined using geometry and/or triangulation. If three light sources are used with a one dimensional sensor or two light sources are used with a two dimensional sensor, then three dimensional position information, such as an x, y, z coordinate as well as an angle of rotation θz may be calculated using geometry and/or triangulation.
The example shown in
Although
Thus, embodiments of the invention may be used in cars as parking sensors or pedestrian detection devices to alert a driver of objects 850, such as pedestrians, trees, or other cars, that may be in the vicinity of the vehicle. Embodiments may also be used in electronic devices, such as smartphones, computers, and tablets to detect a presence or movement of an object, such as a finger. Embodiments may also be used to provide similar functionality to that of a trackball, touchpad, or mouse by tracking the movement of a finger or other object, such as a mouse. Embodiments may also be used to detect movement and provide robotic control over moving parts.
Lens-less sensors may also provide increased response times and sensitivity to changes in an intensity of detected light over traditional lens-based sensors. Lens-less sensors may also be capable of detecting light on much larger detector surfaces than lens-based sensors. These properties enable lens-less sensors to support data communications at high frequencies using modulated light in the hundreds of kilohertz to gigahertz range that may be transmitted through air.
In some embodiments, spectrometric information about an object can be measured in addition to the spatial information described previously. For example, blood oxygen levels may be measured using two colors of light (there are many choices but wavelengths near 660 nm and 940 nm are often selected) to perform a spectrometry on the blood inside the body. A heart rate, photoplethysmograph (PPG), and other oximetry measurements may be obtained from light detected at the lens-less sensor after passing through or being reflected off a blood flow in a person or animal.
PPG signals for pulse oximetry may be measured by calculating a DC signal level and a AC amplitude of the photocurrents from the detected light at each of the two wavelengths λ1 and λ2 after passing through or being reflected off a blood flow in a person or animal. The following ratio may be use to measure saturated blood oxygen:
The connection between R and the actual blood oxygen may be based on simple physical theory or an empirically measured fit between R and blood oxygen levels. This medical information may be provided in an embodiment in conjunction with object tracking and/or spatial positioning functionality.
The foregoing description has been presented for purposes of illustration and description. It is not exhaustive and does not limit embodiments of the invention to the precise forms disclosed. Modifications and variations are possible in light of the above teachings or may be acquired from the practicing embodiments consistent with the invention. For example, some of the described embodiments discuss the use of horizontally and vertically aligned aperture and/or photodetector arrays, but in other embodiments, some of the apertures and/or photodetectors may be aligned in other non-horizontal and non-vertical orientations.
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