Production of semiconductor device
专利汇可以提供Production of semiconductor device专利检索，专利查询，专利分析的服务。并且PURPOSE:To obtain an insulated oxide film free from peripheral projection by forming a concave section in an epitaxial layer, which is converted at the part therof under the concave section into an oxide film by heat treatment and covered on the periphery of the side wall thereof with an oxidation resisting film when the epitaxial layer grown on a semiconductor substrate is isolated like islands with the oxide film. CONSTITUTION:An N type layer 11 is epitaxially grown on a P type Si substrate 10 and with a photoresist as mask, an etching is made to form several inclined concave sections 12 in the layer 11. Then, after an buffer oxide film 13 is produced on the entire surface of the layer 11 including the concave section by heat treatment, an Si3N4 film 14 is grown as oxidation resisting film on the film 13. A photolithography is conducted to remove the bottom part of the film 14 leaving a part thereof from the inclined side wall of the concave section 12 to the surface thereof thereby exposing the film 13. Thereafter, with the film 14 left as mask, a heat treatment is conducted to convert the epitaxial layer under the film 13 into an SiO2 film 16 whereby the layer 11 adjacent thereto is isolated like islands. Accordingly, the existence of the film 14 prevents the generation of any projection at the end of the film 16.，下面是Production of semiconductor device专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 逐级返排气举阀调试试验台及充气测试和压力调整方法 | 2020-05-13 | 528 |
| 一种医院科室互连互动系统 | 2020-05-08 | 89 |
| 一种基于RC负载的台区防光伏并网逆变器孤岛保护装置 | 2020-05-12 | 401 |
| 一种基于分层参数服务器的多机构协同学习系统及方法 | 2020-05-12 | 199 |
| 使用裂纹形成层产生具有预定内部和/或外部轮廓的颜料碎片的方法及颜料碎片 | 2020-05-11 | 555 |
| 一种大容量可调模拟RLC试验负载的匹配与控制方法 | 2020-05-12 | 421 |
| 一种发电机组与逆变电源并联的方法 | 2020-05-08 | 727 |
| 一种医疗工程用搬运设备 | 2020-05-13 | 588 |
| 一种光伏防孤岛检测装置 | 2020-05-11 | 238 |
| 一种新型隔热衬套 | 2020-05-12 | 937 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
