Integrated type sensor and production thereof
专利汇可以提供Integrated type sensor and production thereof专利检索，专利查询，专利分析的服务。并且PURPOSE: To allow the mass production of integration type biosensors which are integrated by joining the sensors of the same kinds or different kinds to each other on the rear surface of a substrate.
CONSTITUTION: The integration type sensor is constituted by joining the sensors of the same kinds or the different kinds to each other on the rear surface of the substrate by combining, for example, plural enzyme electrodes 18 or oxygen electrodes 16. Namely, a wafer is immersed into an aq. soln. of 50% HF:40% NH
4 F=1:6 after the end of anisotropic etching to remove the SiO
2 film used at the time of the etching. The wafer is then throughly washed with boiled pure water after washing for 5 minutes in the soln. of H
2 SO
4 :H
2 O
2 =2:1 to impart hydrophilicity to an Si substrate and to adhere a hydroxyl group (OH, etc.) to the Si atom on the surface. The H
2 O is taken by the dehydration condensation reaction of 20H→O+H
2 O when the wafer is heated for 3 hours at 1000°C in an N
2 atmosphere in the state in which the OH groups attract to each other. The secure joining of Si-O-Si is thus executed. Thus, the crosstalks between the sensor phases are eliminated and the small-sized integration sensors are easily produced in a large quantity.
COPYRIGHT: (C)1991,JPO&Japio，下面是Integrated type sensor and production thereof专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 一种上肢康复训练装置 | 2020-05-08 | 652 |
| 一种用于虚拟定位的方法及设备 | 2020-05-08 | 295 |
| 一种适用于虚拟现实设备的光学系统 | 2020-05-13 | 787 |
| 一种沉浸式智能互动空间解决方法 | 2020-05-14 | 624 |
| 一种评估沉浸式视频转码方案的方法 | 2020-05-13 | 545 |
| 虚拟现实系统、语音交互方法及装置 | 2020-05-11 | 312 |
| 一种基于5G网络的沉浸式可视化校园系统 | 2020-05-12 | 98 |
| 一种基于宽度学习的视觉诱发电位识别情绪方法 | 2020-05-13 | 957 |
| 一种高强度耐腐蚀的韧性黄铜合金电气连接件 | 2020-05-12 | 1002 |
| 互动直播系统 | 2020-05-12 | 488 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
