Circuit pattern inspection instrument for printed wiring board
专利汇可以提供Circuit pattern inspection instrument for printed wiring board专利检索，专利查询，专利分析的服务。并且PURPOSE: To remove the influence of unnecessary reflected light to be given upon a pattern detection signal by detecting retroreflected light through a spatial filter which has an annular light transmission area arranged at the periphery of a minute light shield area arranged in the center of an optical axis and a light shield area arranged at its periphery.
CONSTITUTION: On the circuit pattern surface of the printed wiring board 13 which is formed by forming a circuit pattern having no light diffusibility on a surface having light diffusibility, a laser beam is scanned through a polygon 16, a scanning lens 17, and a mirror 18 and its retroreflected light is detected through the annular transmission type spatial filter 27. A direct reflected component contained in the retroreflected light is cut off by the minute light shield part 100 arranged in the center of the optical axis of the spatial filter 27 and unnecessary retroreflected light is cut off by the outside light shield area 102. Only a diffused light component is transmitted through the annular transmission area 101 to reach a photomultiplier 22, and the influence of the unnecessary retroreflected light to be given upon the pattern detection signal is eliminated.
COPYRIGHT: (C)1990,JPO&Japio，下面是Circuit pattern inspection instrument for printed wiring board专利的具体信息内容。
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