Production of base material for optical fiber
专利汇可以提供Production of base material for optical fiber专利检索，专利查询，专利分析的服务。并且PURPOSE:To prolong the life of a furnace core tube and to obtain the titled high-quality base material without absorbing OH in low coat by retaining or passing a porous vitreous body in or through the specified furnace core tube of a high-temp. furnace, adding F and dehydrating or vitrifying the body. CONSTITUTION:Si3N4 is vapor-deposited and coated in >=1mu thickness on the inner surface of a carbon furnace core tube 15 at 300-1,800 deg.C with a (plasma) CVD process by using an Si material such as SiCl4 and an N material such as NH3 to obtain the carbon furnace core tube 15 with Si3N4 coating. Then a gas such as He, Cl2, O2N2 and SiF4 is supplied from a gas supply port 6 provided at the lower end of the furnace core tube 15. The inside of the tube 15 is kept at 10 -300Torr N2 partial pressure in an N2 atmosphere. While a porous vitreous body 1 attached to a shaft 2 which is rotatable and vertically movable is heated by an electric furnace 3 equipped with a heating element 4 of carbon, etc., F addition, dehydration or vitrification are carried out to obtain the titled base material.，下面是Production of base material for optical fiber专利的具体信息内容。
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