Semiconductor device

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专利汇可以提供Semiconductor device专利检索,专利查询,专利分析的服务。并且PURPOSE: To manufacture a semiconductor device having high reliability efficiently by covering the upper section of a circuit forming surface in a semiconductor pellet with a substance discoloring by the irradiation of beams.
CONSTITUTION: The upper section of a circuit forming surface in a semiconductor pellet 3 is covered with a substance 8 discoloring by the irradiation of beams. A predetermined circuit region is formed onto the surface of a wafer such as a semiconductor wafer 7, and the substance 8 such as a polyimide resin film 8 into which bisbenzene chromium is mixed is applied extending over approximately the whole surface on the circuit forming surface. When a pellet region 9a in which a defective is detected at the stage of probe inspection is irradiated with laser beams 12 having a wavelength of 257μm, the defective pellet region 9a discolors to black from a transparent color, and a mark 11 capable of being visually discriminated is shaped. The semiconductor wafer 7 is divided by each pellet region 9 into semiconductor pellets 3, and the semiconductor pellet in the defective pellet region 9a on which the mark 11 is applied is removed from a process.
COPYRIGHT: (C)1988,JPO&Japio,下面是Semiconductor device专利的具体信息内容。

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