One-piece, hollow micromechanical part with several functional levels formed of a synthetic carbon allotrope based material |
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| 申请号 | US15030710 | 申请日 | 2014-10-06 | 公开(公告)号 | US10106400B2 | 公开(公告)日 | 2018-10-23 |
| 申请人 | NIVAROX-FAR S.A.; | 发明人 | Philippe Dubois; Sebastiano Merzaghi; Christian Charbon; | ||||
| 摘要 | A method for fabrication of a micromechanical part made of a one-piece synthetic carbon allotrope based material, the method including: forming a substrate with a negative cavity of the micromechanical part to be fabricated; coating the negative cavity of the substrate with a layer of the synthetic carbon allotrope based material in a smaller thickness than the depth of the negative cavity; and removing the substrate to release the one-piece micromechanical part formed in the negative cavity. | ||||||
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