SENSING STRUCTURE OF ALIGNMENT OF A PROBE FOR TESTING INTEGRATED CIRCUITS专利检索- 用于测量电功率如电能或电流的时间积分的机-电装置如测量消耗量的时间积分专利检索查询-专利查询网

SENSING STRUCTURE OF ALIGNMENT OF A PROBE FOR TESTING INTEGRATED CIRCUITS
申请号	US15848996	申请日	2017-12-20	公开(公告)号	US20180113168A1	公开(公告)日	2018-04-26
申请人	STMicroelectronics S.r.l.;			发明人	Alberto Pagani;
摘要	A sensing structure is presented for use in testing integrated circuits on a substrate. The sensing structure includes a probe region corresponding to a conductive region for connecting to the integrated circuit. A first sensing region at least partially surrounds the probe region. A plurality of sensing elements connects in series such that a first of the plurality of sensing elements has two terminals respectively connected to the first sensing region and the probe region. And a second of the plurality of sensing elements has two terminals respectively connected to the probe region and a first reference potential.
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