Manufacture of gas angular velocity sensor |
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| 申请号 | JP13601687 | 申请日 | 1987-05-29 | 公开(公告)号 | JPS63298164A | 公开(公告)日 | 1988-12-05 |
| 申请人 | Honda Motor Co Ltd; Stanley Electric Co Ltd; | 发明人 | TAKAHASHI FUMITAKA; OKAZAKI KUNIO; SHIRAISHI MASARU; TAKAHASHI MASAYUKI; | ||||
| 摘要 | PURPOSE:To achieve a higher detection sensitivity, by removing a gold clad on a hot wire by evaporation after mounted while material of the hot wire is thermally treated at a temperature of recrystallization thereof. CONSTITUTION:After being formed and machined, a detection element 1 is connected to a control power source 3 through a power source wire 2 in such a manner as to be allowed to energize hot wires 14 and mounted in a chamber 4 to be sealed up. An exhauster 5 such as vacuum pump is connected to the chamber 4 and, after the sealing of the detection element 11, the chamber 4 is exhausted to vacuum below 1.5Pa. Then, the power source 3 is actuated to energize the hot wires 14 at a temperature and a time length enough to remove a gold clad on the hot wires 14 by evaporation and a heat treatment is performed. Here, the wires 14 are adjusted to the temperature above 1,500 deg.C if made of tungsten to accomplish a secondary crystallization of the tungsten material. | ||||||
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| 说明书全文 | |||||||
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