Temperature controlling apparatus of gas rate sensor |
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| 申请号 | JP14876183 | 申请日 | 1983-08-16 | 公开(公告)号 | JPS6040961A | 公开(公告)日 | 1985-03-04 |
| 申请人 | Tamagawa Seiki Kk; | 发明人 | KATSUNO YASUATSU; | ||||
| 摘要 | PURPOSE:To improve and stabilize angular velocity detecting accuracy of a gas rate sensor, by setting a gas pump generating a gas flow in a closely tight casing and 2 temperature sensitive elements in the gas flow. CONSTITUTION:An electrostrictive vibrating pump 3 is installed in a hermetrically sealed casing 1 by a pump holder 2 and further, holder 5 and nozzle 4 are incorporated by a hollow circular cylinder 13. Electrodes 6a, 6b, 6c, 6d and temperature sensitive elements 7a, 7b are held by the holder 5 and the nozzle 4 is supported to face them. In this case, a constant current independent on the ambient temperature is applied to the two elements 7a, 7b, and a temperature control is conducted with reference to the both-end voltage values of the temperature sensitive elements. Thus, the angular velocity inspection accuracy of the gas rate sensor is improved and stabilized. | ||||||
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