Flow rate range variable type flow rate control apparatus |
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| 申请号 | US15171333 | 申请日 | 2016-06-02 | 公开(公告)号 | US09921089B2 | 公开(公告)日 | 2018-03-20 |
| 申请人 | Fujikin Incorporated; National University Corporation Tohoku University; Tokyo Electron Ltd.; | 发明人 | Tadahiro Ohmi; Masahito Saito; Shoichi Hino; Tsuyoshi Shimazu; Kazuyuki Miura; Kouji Nishino; Masaaki Nagase; Katsuyuki Sugita; Kaoru Hirata; Ryousuke Dohi; Takashi Hirose; Tsutomu Shinohara; Nobukazu Ikeda; Tomokazu Imai; Toshihide Yoshida; Hisashi Tanaka; | ||||
| 摘要 | A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1-P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area. | ||||||
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