UPSTREAM VOLUME MASS FLOW VERIFICATION SYSTEMS AND METHODS |
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| 申请号 | PCT/US2010042100 | 申请日 | 2010-07-15 | 公开(公告)号 | WO2011011255A3 | 公开(公告)日 | 2011-04-28 |
| 申请人 | MKS INSTR INC; DING JUNHUA; ZARKAR KAVEH; | 发明人 | DING JUNHUA; ZARKAR KAVEH; | ||||
| 摘要 | This disclosure relates to mass flow verification systems for and methods of measuring and verifying the mass flow through a mass flow delivery / measurement device such as a mass flow controller. A mass flow verification system comprises a preset volume, a temperature sensor, and a pressure sensor. The measured verified flow determined by the mass flow verification system can be adjusted to compensate for errors resulting from a dead volume within the mass flow measurement device. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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