VERTICAL MOUNT MASS FLOW SENSOR专利检索- 测量流量的比例专利检索查询-专利查询网

VERTICAL MOUNT MASS FLOW SENSOR
申请号	PCT/US2006043013	申请日	2006-11-03	公开(公告)号	WO2007061608A2	公开(公告)日	2007-05-31
申请人	MKS INSTR INC; DING JUNHUA; L BASSI MICHAEL; ZARKAR KAVEH H;			发明人	DING JUNHUA; L BASSI MICHAEL; ZARKAR KAVEH H;
摘要	A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving surface. A thermal sensor tube has a thermal sensing portion that is mounted relative to the sensor receiving surface in a direction substantially perpendicular to both the primary flow path and the sensor receiving surface. When the thermal mass flow meter is mounted in a vertical direction so that fluid within the conduit flows in the vertical direction along the primary flow path, fluid within the sensor tube flows in a horizontal direction so as to substantially prevent thermal siphoning when the sensor tube is heated.
权利要求
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