Divided flow structure of mass flow controller |
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| 申请号 | JP22807790 | 申请日 | 1990-08-31 | 公开(公告)号 | JPH04110617A | 公开(公告)日 | 1992-04-13 |
| 申请人 | Nippon Tairan Kk; | 发明人 | NAKAJIMA TAKESHI; | ||||
| 摘要 | PURPOSE: To obtain the stabilized divided flows by providing a flow-rate measuring flow path so as to connect a first ring-shaped flow path and a second ring- shaped flow path which are in parallel with a main flow path. CONSTITUTION: An inlet port 41 and an outlet port 42 of a flow-rate measuring flow path 40 are provided for a first ring-shaped flow path 56 and a second ring-shaped flow path 58. The action of a straightening element is generated in the ring-shaped flow path. Three projections 54 are elastically in contact with an inner surface 26 of a circular flow path 25 on the upstream side. Fluid is taken into the flow-rate measuring flow path 40 from the ring-shaped flow paths 56 and 58 having the uniform flow-path cross section in the circumferential direction. Therefore, the accurate flow-rate measurement can be performed at a sensor part 14. When the cross-sectional area of the first ring-shaped flow path 56 and the corss-sectional area of the second ring-shaped flow path 58 are adjusted, the stability in the flow-rate measuring flow path 40 can be further increased. COPYRIGHT: (C)1992,JPO&Japio |
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