Drying method and apparatus using hot pure water |
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| 申请号 | JP33259590 | 申请日 | 1990-11-29 | 公开(公告)号 | JPH04197479A | 公开(公告)日 | 1992-07-17 |
| 申请人 | Supiide Fuamu Clean Syst Kk; | 发明人 | YOSHIKAWA HARUO; | ||||
| 摘要 | PURPOSE: To drain and dry a work by a method wherein pure water whose dissolved air is reduced up to the saturated air quantity or less at set temp. is sent to a heater to obtain hot pure water with the set temp. by the heater and this hot pure water is supplied to a hot pure water tank to dip the work wetted with water in the hot pure water and the heated work is drawn up. CONSTITUTION: Pure water from which impurities are removed is sent to a degassing apparatus 5 from a pure water source 4 to remove the dissolved air in pure water and the degassed pure water is heated by a heater 7 to obtain hot pure water with predetermined temp. and this hot pure water is quantitatively and continuously supplied to a hot pure water tank 1 from a supply port 1a while the hot pure water overflowing from the tank 1 flows in a recovery trough 50 to be discharged through a recovery pipe 51. At this time, since the pure water is heated by the heater 7 after the dissolved air in the pure water is removed up to saturated air quantity or less by the degassing apparatus 5, the generation of air bubbles accompanied by heating is eliminated and, therefore, the disturbance of the surface of water due to the appearance of air bubbles on the surface of the water is eliminated. The heat efficiency of the heater 7 is enhanced by the removal of dissolved air and the temp. rise at the time of heating becomes fast and, in holding hot pure water to constant temp., the surface temp. of the heater 7 can be lowered. COPYRIGHT: (C)1992,JPO&Japio |
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