A LATERAL TRANSFER SYSTEM |
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申请号 | PCT/CA2011050124 | 申请日 | 2011-03-01 | 公开(公告)号 | WO2011106896A8 | 公开(公告)日 | 2011-11-10 |
申请人 | PLASCO ENERGY GROUP INC; PLASCOENERGY IP HOLDINGS S L BILBAO SCHAFFHAUSEN BRANCH; BACON MARC; TSANGARIS ANDREAS; | 发明人 | BACON MARC; TSANGARIS ANDREAS; | ||||
摘要 | A modular lateral transfer system for use in a horizontally oriented processing chamber is provided. Each module has the ability to deliver process gas in addition to moving the reactant material through the horizontally oriented processing chamber. The modular design enables the operator to remove and replace a module of the system, thereby substantially minimizing the downtime of the chamber required during servicing. | ||||||
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说明书全文 |