Positive displacement vacuum pump |
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| 申请号 | JP29058490 | 申请日 | 1990-10-26 | 公开(公告)号 | JPH03160185A | 公开(公告)日 | 1991-07-10 |
| 申请人 | Alcatel Cit; | 发明人 | JIYANNMARII KURINKETSUTO; ERITSUKU TABERURE; | ||||
| 摘要 | PURPOSE: To prevent the molecules of pumped gas from flowing from an exhaust port toward a suction port by providing a means whereby a gas having a larger molecular mass than the pumped gas or a gas mixture is injected into a gap between a rotor and a stator. CONSTITUTION: This pump, when used as a multistage pump in which three stages of root pumps 10, 20 30 having respective stators 11, 21, 31 and respective pairs of rotors 12-13, 22-23, 33-33 are connected in series, has an injection means for directly injecting gas into a gap 35 between the rotor and stator of each of the stages of pumps 10, 20, 30. The gas injected has a larger molecular mass than pumped gas, and this injection is effected via an injection hole 40 connected to an auxiliary gas source penetrating the stator and capable of adjusting flow. The gas injected prevents the molecules of the pumped gas from flowing from an exhaust port toward a suction port. COPYRIGHT: (C)1991,JPO |
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