VACUUM PUMP WITH COOLING APPARATUS |
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| 申请号 | US15548312 | 申请日 | 2016-09-07 | 公开(公告)号 | US20180030983A1 | 公开(公告)日 | 2018-02-01 |
| 申请人 | In Cheol LEE; | 发明人 | In Cheol LEE; | ||||
| 摘要 | The present invention relates to a technology of efficiently cooling a vacuum pump that produces a vacuum in a process chamber of a semiconductor manufacturing facility. The present invention provides a new type of vaccum pump cooling method that keeps the internal temperature of a vacuum pump at a predetermined level by circulating oil through rotors of the vacuum pump, such that it is possible to prevent a rapid increase in the temperature of the vacuum pump and smoothly lubricate bearings at the early stage of operation, whereby it is possible to ensure stability when performing processes and operating the pump and economically maintain the facility. | ||||||
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