Multi-stage roots vacuum pump of which inside can be cleaned |
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| 申请号 | JP26564389 | 申请日 | 1989-10-12 | 公开(公告)号 | JPH03130592A | 公开(公告)日 | 1991-06-04 |
| 申请人 | Anlet Co Ltd; | 发明人 | YOKOI KOMEI; | ||||
| 摘要 | PURPOSE: To discharge impurities easily by oil sealing between two overshooting recess grooves formed on the housing side between shaft bearings for supporting rotary shafts of a multi-stage vacuum pump and a housing neck part and the neck part. CONSTITUTION: A three-lobe type Roots rotor 3 of a multi-stage (two-stage, for example, as illustrated) vacuum pump is fixed to a rotary shaft 4 and contained in a casing 2. A first and a second overshooting recess grooves 6, 16 are formed on the side of a housing 1 between a neck part 5 of the housing 1 installed on a side part of a casing 2 and a shaft bearing 27 for supporting a rotary shaft 4 to communicate with a first and a second drain passages 10, 18. The casing 2 and the drain passage 10 are connected 11 with each other. A first and a second overshooting materials 22, 25 are formed at corresponding parts of the rotary shaft 4 to the recess grooves 6, 16. Oil seals 14, 13 of ethylene tetrafluoride resin are engaged between the overshooting recess grooves 16, 6 and the neck part 5 of the housing 1. Cleaning liquid and impurities mixed in oil can thus be discharged out easily. COPYRIGHT: (C)1991,JPO&Japio |
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