Two-shaft vacuum pump with suction chamber |
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| 申请号 | JP27511989 | 申请日 | 1989-10-24 | 公开(公告)号 | JPH02153292A | 公开(公告)日 | 1990-06-12 |
| 申请人 | Leybold Ag; | 发明人 | BERGES HANNS-PETER DR; | ||||
| 摘要 | PURPOSE: To enable solid particles immersed into a pump to deposit in a suction chamber by forming an opening of a scavenging gas conduit at the pressure side of the suction chamber in a pump in which engaged rotor pairs cooperate with a suction chamber wall, and a suction side and a pressure side are formed. CONSTITUTION: In a three-staged vacuum pump 1 with three pairs of rotors 4, 5; 6, 7; 8, 9 arranged axially on two shafts 2, 3, each pair of rotors comprises engagement portions 41, 42 and notches 43, 44 respectively supported in suction chambers 11, 12, 13 for rotating synchronously in a non-contact manner. The rotors 4, 6, 8 are controlled by inlet openings 32, 35 and the other rotors 5, 7, 9 are controlled by outlet openings 33, 37. A suction side 47 and a pressure side 48 are defined by each of the rotor pairs. In this case, an opening 49 of a scavenging gas conduit leading to a gas bomb is formed in the vicinity between gap seals between the two rotors in the pressure side 48 of each suction chamber 12, 13. COPYRIGHT: (C)1990,JPO |
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