专利汇可以提供Method of manufacturing an electromechanical system having a high resonance frequency专利检索,专利查询,专利分析的服务。并且The invention relates to a method of manufacturing an electromechanical resonator comprising a substrate provided, in one of its faces, with a recess and a piezoelectric wafer adhering to said substrate at the periphery of said recess. The resonating portion of the device is delimited by electrodes deposited upon the respective faces of said wafer, the electrode located upon the free face of said wafer being located above said recess. The method comprises flattening the adjacent faces of the wafer and substrate and depositing films on said faces which may be secured together to form a conductive layer. The thickness of the wafer is reduced by erosion of its free face following which an electrode is deposited on said free face.,下面是Method of manufacturing an electromechanical system having a high resonance frequency专利的具体信息内容。
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