Piezoelectric resonator with multi layer electrodes
阅读：513发布：2023-03-21
专利汇可以提供Piezoelectric resonator with multi layer electrodes专利检索，专利查询，专利分析的服务。并且A resonator comprising a single crystal plate of lithium tantalate, lithium niobate or the like is provided having electrodes formed on the plate, the electrodes being multiple layers including gold, chromium, copper and chromium. A novel method of forming such a resonator is also disclosed.，下面是Piezoelectric resonator with multi layer electrodes专利的具体信息内容。
1. A RESONATOR COMPRISING A PLATE OF PIEZOELECTRIC MATERIAL CONTAINING LITHIUM, ELECTRODES FORMED ON OPPOSITE SIDES OF SAID PLATE AND EACH ELECTRODE COMPRISING A FIRST LAYER OF CHROMIUM ADJACENT SAID PIEZOELECTRIC PLATE, A SECOND LAYER OF COPPER FORMED OVER SAID FIRST LAYER, A THIRD LAYER OF CHROMIUM FORMED OVER SAID SECOND LAYER, AND A FOURTH OUTER LAYER OF A NOBLE METAL FORMED OVER SAID THIRD LAYER.
2. A resonator according to claim 1 in which the outer layer of each of said electrodes is silver.
3. A resonator according to claim 1, in which said piezoelectric material is lithium tantalate.
4. A resonator according to claim 1, in which said piezoelectric material is lithium niobate.
5. A resonator according to claim 1, in which the outer layer of each said electrodes is gold.
6. A resonator comprising a plate of piezoelectric material containing lithium, electrodes formed on opposite sides of said plate and each electrode comprising a first layer of titanium adjacent said piezoelectric plate, a second layer of copper formed over said first layer, a third layer of titanium formed over said second layer, and a fourth outer layer of a noble metal formed over said third layer.
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