Semiconductor device

阅读:460发布:2023-03-17

专利汇可以提供Semiconductor device专利检索,专利查询,专利分析的服务。并且PURPOSE:To restrict unevenness of noise characteristic and Hfe of a lateral type bipolar transistor by a method wherein respective junction faces of an emitter and a collector are formed in full-cheeked shapes, and the base length is shortened in the deep part. CONSTITUTION:An N type epitaxial layer 2 on a P type Si substrate 1 is isolated by a P type layer 3, and an SiO2 mask 62 is applied and diffusion is performed to form the first P type emitter 4 and the first collector 5. The mask 62 is removed, an N type epitaxial layer 70 is accumulated thereon, an SiO2 mask 63 having narrow openings is applied and diffusion is performed to accumulate the second P type emitter 9, the second collector 10, the second step isolation layer 8 respectively on the first layer. Then an SiO2 layer 64 is formed by vapor growth, openings are formed and Al electrodes 11-13 are provided. By this constitution, because carriers injected from the emitter are conducted inside of the substrate without being conducted in the surface of the substrate having many surface states, swing of the collector current or increase of the base current are not generated and unevenness of noise characteristic and Hfe can be restricted easily.,下面是Semiconductor device专利的具体信息内容。

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