Detecting method for position of positioning mark
专利汇可以提供Detecting method for position of positioning mark专利检索，专利查询，专利分析的服务。并且PURPOSE:To detect the position rapidly and automatically by utilizing either AC component, signal strength thereof is larger, of the phase sum signal output strength and phase difference signal output strength of a charged particle detector. CONSTITUTION:Mark signals obtained by a positioning mark signal detector 5 are supplied to an addition circuit 7 or a subtraction circuit 8 through a switching circuit 6. The signals passing through the circuit 8 are given to a pulse-height detecting circuit 13, and signals passing through the circuit 7 are differentiated by a differentiation circuit 9, a DC section is removed and the value is given to the circuit 13. The circuit 13 detects the crest value of both signals, and a comparison circuit 14 selects the crest value, the AC component thereof is larger, of the signals passing through the circuit 7 and the signals passing through the circuit 8, and transmits the signals to a CPU 15. The CPU 15 fixes the circuit 6 to processing, in which pulse height is larger, according to the signals. A signal wave-form phase-sum signal-processed or phase-difference signal-processed passes through an inversion circuit 10, and a signal wave- form having peaks symmetrical in the scanning direction of electron beams in response to the structure of the positioning mark is acquired.，下面是Detecting method for position of positioning mark专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 一种高效节能塑件注塑成型工艺 | 2020-05-08 | 518 |
| 运粮车辆作业队列融合及复合提醒的方法 | 2020-05-11 | 668 |
| 一种养殖羊栖菜初级产品干品品质等级分类方法 | 2020-05-11 | 440 |
| 一种草菇栽培料及其制备方法和应用 | 2020-05-11 | 298 |
| 一种铝包木门窗框架用添加剂的制备方法 | 2020-05-11 | 521 |
| 一种石榴果肉加工方法 | 2020-05-12 | 791 |
| 一种通脊肉成型加工模具及加工工艺 | 2020-05-12 | 445 |
| 一种用于涉税企业成本大数据比对的方法 | 2020-05-11 | 120 |
| 一种烟草收购用快速烘干架 | 2020-05-11 | 103 |
| 移动式黄曲霉毒素检测仪 | 2020-05-12 | 78 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
