CONVEYING DEVICE |
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| 申请号 | US15750340 | 申请日 | 2016-08-03 | 公开(公告)号 | US20180222038A1 | 公开(公告)日 | 2018-08-09 |
| 申请人 | NITTO DENKO CORPORATION; | 发明人 | Youhei MAENO; Akira SUZUKI; | ||||
| 摘要 | Provided is a transport apparatus which exhibits a strong gripping force, hardly contaminates an object being transported, and has excellent heat resistance. Also provided are a method of manufacturing a semiconductor device and a method of manufacturing an optical member in which the object is transported at high speed. The transport apparatus of the present invention includes a transport member comprising a carrying member and a mounting member; the mounting member includes a fibrous columnar structure; the fibrous columnar structure includes a fibrous columnar structure including a plurality of fibrous columnar objects; the plurality of fibrous columnar objects are each aligned in a direction substantially perpendicular to the carrying member; and a surface of the fibrous columnar structure on a side opposite to the carrying member has a coefficient of static friction against a glass surface of 2.0 or more. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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