Method and apparatus for checking defect on surface of magnetic disk
专利汇可以提供Method and apparatus for checking defect on surface of magnetic disk专利检索，专利查询，专利分析的服务。并且PURPOSE:To make it possible to detect a very shallow defect in comparison with the size automatically, by projecting slant parallel illuminating light on the surface of a disk, and measuring the distribution of the illuminance of the reflected light by a photoelectric conversion means provided with a light shielding optical system. CONSTITUTION:A sample conveying part 29 on a base 34 can be made to move in parallel by a pulse motor 30. A holder 27, which is mounted on a housing 22, can be rotated by a DC motor 24. A slant parallel illuminating dvice 20 is constituted of a light source 9, a pinhole 10 and a convex lens 11. A pinhole 13 is provided between convex lenses 12 and 14 in a light shielding optical system 18. After the system 18, a pinhole 15 and a photoelectric conversion element 16 are arranged. Thus a photoelectric conversion device 21 is constituted. Slant parallel illuminating light 6 is projected from the device 20 on an applied film 5 of a magnetic disk 1, which is mounted on the holder 27. The distribution of the illuminance of reflected light 7 is measured by the device 21, and defects 2 and 3 in a crator shape and a stripe shape on the surface of the disk are detected.，下面是Method and apparatus for checking defect on surface of magnetic disk专利的具体信息内容。
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